Reminder: always watch loading and unloading
tdo at stanford.edu
Thu Aug 27 09:28:18 PDT 2009
Please remember to watch *every load and unload *through the viewport to
make sure the wafer is transferred correctly. If you see the wafer
fall, pressing "ESC" on the keyboard will hault all mechanical movement
before it gets crushed by the arm. That way you can save the wafer, and
the chamber does not get covered in wafer fragments.
This is especially important after major maintenance (right now) as it
is tricky to align everything properly. Also if you watch/identify
where the wafer gets mishandled, it helps maintenance troubleshoot the
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