From jimkruger at yahoo.com  Mon Jan 12 11:57:13 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Mon, 12 Jan 2009 11:57:13 -0800 (PST)
Subject: PQuest update 1-12-09
In-Reply-To: <496596DC.5020308@stanford.edu>
Message-ID: <886055.61521.qm@web38904.mail.mud.yahoo.com>

Sorry to be so slow,  my desk move has me even more disorganized than usual.

The Gate valve seems to work OK, I got about 1.1  mTorr/minute, slowing for long times to 1.0  (out to 28 minutes).

The chuck heater acts burned out. The read-out still works. The work-around is to use the chiller, setting about 3 degrees (or more for high power) below the desired chuck temp. and watch the temp. manually.   By the way, I only just learned that setting the temp controller in "Manual" (indicator light on) results in fixed power to the heater, possibly burning it out.  I found it in Manual.

The wafer clamp is now electrically isolated from ground, resulting in about higher voltages for the same recipe (about 42% for the recipes I have tried).  Jim McVittie's input is that the RF is now more efficient so to reproduce the voltage of an old recipe, reduce the RF by about 40% (cut and try).  This change will hopefully reduce RF current though the clamp springs and lengthen their life-time.

The five finger clamp is still in place so voltage always reads.  The down-side of this clamp is that standard thickness wafers appear to be distorted a little, giving higher back-side He flows the the other clamp.  I was getting about 8.4 sccm.  The "no-wafer" flow is 11 so we have about a delta of 3 which is just OK, but not ideal.  Best is a indicated flow of 3 sccm (3 is the zero offset).
I have found that thicker carrier wafers give a lower flow.  With a 770 um wafer I get about 5.2 sccm this week.  I have seen as low as 4.5 with thick wafers.  If cooling is critical to an etch, consider getting thicker carrier wafers.


jimkruger
 

.  
--- On Wed, 1/7/09, Thomas O'Sullivan <tdo at stanford.edu> wrote:

> From: Thomas O'Sullivan <tdo at stanford.edu>
> Subject: pquest gate valve
> To: "jim kruger" <jimkruger at yahoo.com>
> Date: Wednesday, January 7, 2009, 10:02 PM
> Hi Jim,
> I heard John thought he solved the gate valve problem.  Did
> you get a chance to a run a leak-up check?
> 
> Thanks!
> Tom


      


From mihuhou at stanford.edu  Wed Jan 21 22:38:32 2009
From: mihuhou at stanford.edu (Ying Chen)
Date: Wed, 21 Jan 2009 22:38:32 -0800 (PST)
Subject: Pquest free 01/22/2009 morning ~8~10am.
In-Reply-To: <886055.61521.qm@web38904.mail.mud.yahoo.com>
Message-ID: <1853338065.1813731232606312338.JavaMail.root@zm06.stanford.edu>

Please feel free to use the time reserved by mihuhou on 01/22/2009 morning.
I don't have access to Coral right now so can't remove the reservation.

Thanks!
Ying


From jimkruger at yahoo.com  Fri Jan 23 15:17:22 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Fri, 23 Jan 2009 15:17:22 -0800 (PST)
Subject: Proposal to Extend Cl week this time only
Message-ID: <594893.14323.qm@web38907.mail.mud.yahoo.com>

Because PQuest has been down most of this Cl week, I propose to extend Cl week until Wed. morning, 7am, 1/28/09.

This will give F users Wed., 1/28 until 2/2/09, the "1st Monday of the month".

I will leave a note on the system.  

If this affects your plans, we can discuss it.

Remember, Cl can be used any day but F or etching of low volatile (hot etches) only from the 2nd Tuesday to the next clean (3rd Monday) or rom 8 days after that to the next "1st Monday" clean.

jimkruger


      


From mihuhou at stanford.edu  Mon Jan 26 12:56:41 2009
From: mihuhou at stanford.edu (Ying Chen)
Date: Mon, 26 Jan 2009 12:56:41 -0800
Subject: Pquest free 3:30~6:30pm today.
References: <49009C95.4040507@stanford.edu>
Message-ID: <007601c97ff8$96b151f0$4d6318ac@stanford.edu>




From jimkruger at yahoo.com  Tue Jan 27 15:57:17 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Tue, 27 Jan 2009 15:57:17 -0800 (PST)
Subject: PQuest Update and summary1-27-09
Message-ID: <194831.59521.qm@web38902.mail.mud.yahoo.com>

My take on the current PQuest status.  All subject to change with the input of more data.

jim


      
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From jswi at stanford.edu  Thu Jan 29 13:24:43 2009
From: jswi at stanford.edu (Jung-Sub Wi)
Date: Thu, 29 Jan 2009 13:24:43 -0800 (PST)
Subject: realsed from 14:00~16:00, Sooory too late notice
In-Reply-To: <1918990902.2899871233264232425.JavaMail.root@zm09.stanford.edu>
Message-ID: <2071495249.2899941233264283308.JavaMail.root@zm09.stanford.edu>



From krivoire at stanford.edu  Thu Jan 29 19:16:45 2009
From: krivoire at stanford.edu (Kelley Rivoire)
Date: Thu, 29 Jan 2009 19:16:45 -0800 (PST)
Subject: pquest free tonight
Message-ID: <1903447406.4203451233285405469.JavaMail.root@zm02.stanford.edu>

pquest free now

Kelley