Pquest RFOUT

Ying Chen mihuhou at stanford.edu
Sat Jun 13 11:09:40 PDT 2009


Hi, PQ users,

I was trying to use OXYGEN3.RCP to clean the chamber. But the RF was showing "RFOUT" with RF power reading <5 and the matching system always went out of limit.

Does anyone know how to solve this?

Thanks!
Ying



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