Again. Re: Pquest RFOUT

Ying Chen mihuhou at
Wed Jun 17 20:00:20 PDT 2009

RFOUT again! 

Users before me,
Was RF ok when you were using the pquest today?


----- Original Message -----
From: Ying Chen <mihuhou at>
To: pquest at
Sent: Sat, 13 Jun 2009 11:09:40 -0700 (PDT)
Subject: Pquest RFOUT

Hi, PQ users,

I was trying to use OXYGEN3.RCP to clean the chamber. But the RF was showing "RFOUT" with RF power reading <5 and the matching system always went out of limit.

Does anyone know how to solve this?


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