Again. Re: Pquest RFOUT
mihuhou at stanford.edu
Wed Jun 17 20:00:20 PDT 2009
Users before me,
Was RF ok when you were using the pquest today?
----- Original Message -----
From: Ying Chen <mihuhou at stanford.edu>
To: pquest at snf.stanford.edu
Sent: Sat, 13 Jun 2009 11:09:40 -0700 (PDT)
Subject: Pquest RFOUT
Hi, PQ users,
I was trying to use OXYGEN3.RCP to clean the chamber. But the RF was showing "RFOUT" with RF power reading <5 and the matching system always went out of limit.
Does anyone know how to solve this?
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