Again. Re: Pquest RFOUT

Senyo Dogbe senyod at yahoo.com
Thu Jun 18 05:54:05 PDT 2009


Ying,
I used it to etch 3 wafers successfully. There was no RFOUT problem. Jim Krugger also did not have this problem.
Senyo

--- On Wed, 6/17/09, Ying Chen <mihuhou at stanford.edu> wrote:

> From: Ying Chen <mihuhou at stanford.edu>
> Subject: Again. Re: Pquest RFOUT
> To: "Ying Chen" <mihuhou at stanford.edu>
> Cc: pquest at snf.stanford.edu
> Date: Wednesday, June 17, 2009, 8:00 PM
> RFOUT again! 
> 
> Users before me,
> Was RF ok when you were using the pquest today?
> 
> Thanks!
> Ying
> 
> ----- Original Message -----
> From: Ying Chen <mihuhou at stanford.edu>
> To: pquest at snf.stanford.edu
> Sent: Sat, 13 Jun 2009 11:09:40 -0700 (PDT)
> Subject: Pquest RFOUT
> 
> Hi, PQ users,
> 
> I was trying to use OXYGEN3.RCP to clean the chamber. But
> the RF was showing "RFOUT" with RF power reading <5 and
> the matching system always went out of limit.
> 
> Does anyone know how to solve this?
> 
> Thanks!
> Ying
> 
> 


      



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