hydrogen termination of carbon films

Jim Wilkins jim at sensorin.com
Fri Nov 20 16:46:33 PST 2009

Has anyone tried to H-terminate a-C or other types of carbon using the
instrument? Literature suggests much higher pressures for inductively
coupled H plasmas (10 torr vs. 10 mtorr).
Jim Wilkins, Ph.D. 
Sensorin, Inc.
863A Mitten Rd.
Burlingame, CA 94010
t. 650-552-9324
m. 650-213-6262
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