tdo at stanford.edu
Thu Oct 1 12:21:44 PDT 2009
Log your process! There have been notes about this before. The next
user needs to know what materials and recipe you are running to
determine the cleanliness of the chamber. The last logbook entry is
dated 9/25/09, and there have been many users since then.
We may start disqualifying users who do not use the logbook -- consider
yourself warned. This is for the good of the fab!
PS- Watch every wafer load and unload too.
More information about the pquest