pquest LOGBOOK

Thomas O'Sullivan tdo at stanford.edu
Thu Oct 1 12:21:44 PDT 2009


Pquest Users:
Log your process!  There have been notes about this before.  The next 
user needs to know what materials and recipe you are running to 
determine the cleanliness of the chamber.  The last logbook entry is 
dated 9/25/09, and there have been many users since then.

We may start disqualifying users who do not use the logbook -- consider 
yourself warned.   This is for the good of the fab!

Tom

PS- Watch every wafer load and unload too.






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