From dlee76 at stanford.edu Wed Sep 9 13:08:02 2009 From: dlee76 at stanford.edu (Donkoun Lee) Date: Wed, 09 Sep 2009 13:08:02 -0700 Subject: Release from 8:30 am to 11:30 am Message-ID: Hi. I moved my session in the night from 00:00 AM to 4:00 AM. Thank you. Best, Donkoun Lee -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From jimkruger at yahoo.com Wed Sep 9 19:23:46 2009 From: jimkruger at yahoo.com (jim kruger) Date: Wed, 9 Sep 2009 19:23:46 -0700 (PDT) Subject: Fw: Comment pquest SNF 2009-09-09 12:47:53: PQuest up, but: Message-ID: <710384.97745.qm@web38906.mail.mud.yahoo.com> I am told that this came through scrambled, so here it is again. Added note, the RF tuning preset is very critical, must be about 0.1 on left, 0.15 on right tuning meter. If it is very far out, "RF out" results. --- On Wed, 9/9/09, jimkruger at snf.stanford.edu wrote: > From: jimkruger at snf.stanford.edu > Subject: Comment pquest SNF 2009-09-09 12:47:53: PQuest up, but: > To: pquest-pcs at snf.stanford.edu > Date: Wednesday, September 9, 2009, 12:47 PM > In Standby, foreline pressure reads > high (about 150 mTorr) and as a result Turbo current is high > also (4.1 Amps).? This is OK except I am not sure why > it changed. > Leak up rate is 1.7 mTorr/minute, OK. > Voltage vs RF power reads low? (similar to last year's > numbers). > "Oxygen3", 700/100 watts, gives 64 volts. > I think this means that the RF power to be used in your > recipe must be determined again, check etch rate of your > material and your etch mask before committing important > samples.? Please communicate your results. > He blow-by is OK, about 1 sccm at 10 Torr. > Heater is fixed, so back to setting the chiller about 10 C > below the desired temperature and the controller to about the > chuck temperature. > The system is "clean" so we are stating "Cl only? > week" today and hopefully back on the schedule:? Clean > 1st and 3rd Mondays of the month, Cl only until Tuesday a > week later.? F and high temperature etches allowed > until the next cleaning date. > > __________________________________________________ Do You Yahoo!? Tired of spam? Yahoo! Mail has the best spam protection around http://mail.yahoo.com From jswi at stanford.edu Thu Sep 10 17:12:49 2009 From: jswi at stanford.edu (Jung-Sub Wi) Date: Thu, 10 Sep 2009 17:12:49 -0700 (PDT) Subject: PQUEST release from 9:30 to 12:00 tonight Message-ID: <1497449358.3636561252627969551.JavaMail.root@zm09.stanford.edu> Sorry for the late notice. Jung-Sub Wi From mihuhou at stanford.edu Wed Sep 16 18:20:02 2009 From: mihuhou at stanford.edu (Ying Chen) Date: Wed, 16 Sep 2009 18:20:02 -0700 (PDT) Subject: Wafer broken In-Reply-To: <1497449358.3636561252627969551.JavaMail.root@zm09.stanford.edu> Message-ID: <2039165586.3210031253150402827.JavaMail.root@zm06.stanford.edu> Wafer broken during unloading. The main wafer was out but two small pieces were left on the chuck. I am sorry! From dlee76 at stanford.edu Fri Sep 18 16:48:37 2009 From: dlee76 at stanford.edu (Donkoun Lee) Date: Fri, 18 Sep 2009 16:48:37 -0700 Subject: Release from 1:00 AM to 4:00 AM tomorrow morning Message-ID: Hi. I finished my process on the earlier session. Thank you and Good Luck. Best, Don -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From mihuhou at stanford.edu Sun Sep 20 14:36:29 2009 From: mihuhou at stanford.edu (Ying Chen) Date: Sun, 20 Sep 2009 14:36:29 -0700 Subject: Pquest free until 6:00pm. Message-ID: <0ba001ca3a3a$6b82d150$4d6318ac@stanford.edu> Sorry for the late notice! Ying -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Tue Sep 22 12:47:26 2009 From: jimkruger at yahoo.com (jim kruger) Date: Tue, 22 Sep 2009 12:47:26 -0700 (PDT) Subject: PQuest released today, 9-22-09 1400-1730 EOM Message-ID: <506491.96984.qm@web38901.mail.mud.yahoo.com> From jimkruger at yahoo.com Tue Sep 22 17:35:48 2009 From: jimkruger at yahoo.com (jim kruger) Date: Tue, 22 Sep 2009 17:35:48 -0700 (PDT) Subject: PQuest released tomorrow, Wed. 9-23-09 0930 to 1400 EOM Message-ID: <119478.44732.qm@web38906.mail.mud.yahoo.com> From dlee76 at stanford.edu Wed Sep 23 17:20:14 2009 From: dlee76 at stanford.edu (Donkoun Lee) Date: Wed, 23 Sep 2009 17:20:14 -0700 Subject: Release afternoon reservation for tomorrow Message-ID: Hi. Samples are not ready. Sorry for the late notice. Thank you. Best, Donkoun Lee -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From jimkruger at yahoo.com Mon Sep 28 10:53:46 2009 From: jimkruger at yahoo.com (jim kruger) Date: Mon, 28 Sep 2009 10:53:46 -0700 (PDT) Subject: PQuest available today, Monday, 9-28-09, now and until 6 pm EOM Message-ID: <550475.35438.qm@web38902.mail.mud.yahoo.com> From mihuhou at stanford.edu Tue Sep 29 00:11:58 2009 From: mihuhou at stanford.edu (Ying Chen) Date: Tue, 29 Sep 2009 00:11:58 -0700 (PDT) Subject: Pquest free 10am~13pm on Tuesday. In-Reply-To: <550475.35438.qm@web38902.mail.mud.yahoo.com> Message-ID: <317356101.517921254208318132.JavaMail.root@zm06.stanford.edu> Sorry for the late notice! From tdo at stanford.edu Wed Sep 30 14:21:17 2009 From: tdo at stanford.edu (Thomas O'Sullivan) Date: Wed, 30 Sep 2009 14:21:17 -0700 Subject: pquest free 5-7:30pm tonight Message-ID: <4AC3CBCD.6040501@stanford.edu> -- Thomas D. O'Sullivan Ph.D. Candidate, Electrical Engineering Center for Integrated Systems Stanford University 420 Via Palou, CIS-X Room B113 Stanford, CA 94305-4075 o: (650)725-6970 c: (708)261-5383 f: (650)723-4659 http://snow.stanford.edu/~tdo/