Fw: Comment pquest SNF 2009-09-09 12:47:53: PQuest up, but:
jimkruger at yahoo.com
Wed Sep 9 19:23:46 PDT 2009
I am told that this came through scrambled, so here it is again.
Added note, the RF tuning preset is very critical, must be about 0.1 on left, 0.15 on right tuning meter. If it is very far out, "RF out" results.
--- On Wed, 9/9/09, jimkruger at snf.stanford.edu <jimkruger at snf.stanford.edu> wrote:
> From: jimkruger at snf.stanford.edu <jimkruger at snf.stanford.edu>
> Subject: Comment pquest SNF 2009-09-09 12:47:53: PQuest up, but:
> To: pquest-pcs at snf.stanford.edu
> Date: Wednesday, September 9, 2009, 12:47 PM
> In Standby, foreline pressure reads
> high (about 150 mTorr) and as a result Turbo current is high
> also (4.1 Amps). This is OK except I am not sure why
> it changed.
> Leak up rate is 1.7 mTorr/minute, OK.
> Voltage vs RF power reads low (similar to last year's
> "Oxygen3", 700/100 watts, gives 64 volts.
> I think this means that the RF power to be used in your
> recipe must be determined again, check etch rate of your
> material and your etch mask before committing important
> samples. Please communicate your results.
> He blow-by is OK, about 1 sccm at 10 Torr.
> Heater is fixed, so back to setting the chiller about 10 C
> below the desired temperature and the controller to about the
> chuck temperature.
> The system is "clean" so we are stating "Cl only
> week" today and hopefully back on the schedule: Clean
> 1st and 3rd Mondays of the month, Cl only until Tuesday a
> week later. F and high temperature etches allowed
> until the next cleaning date.
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