Reminder: PQuest users' meeting, 2 pm today

Mary Tang mtang at
Wed Dec 1 10:34:01 PST 2010

Hi all --

Just a reminder that there's a pquest users' meeting today, at 2 pm, in 
Allen 201.  We will discuss:

1.  Current equipment status and process concerns/results.

2.  Chlorine versus fluorine/high temp scheduling

3.  Logging run date

4.  Process quals

If you can't make it and want to be heard, please send a representative 
or forward information to this list or favorite staff member.


Team Etch

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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