From ntayebi at stanford.edu  Fri Feb  5 15:47:29 2010
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Fri, 5 Feb 2010 15:47:29 -0800 (PST)
Subject: A good SF6 recipe
Message-ID: <686093817.4709981265413649926.JavaMail.root@zm02.stanford.edu>

Hi everyone,

I was wondering if anyone has a good SF6 recipe. I want to etch a few 100 nm of Si. Let me know.

Thanks,

Noureddine


From jimkruger at yahoo.com  Wed Feb 10 09:00:23 2010
From: jimkruger at yahoo.com (jim kruger)
Date: Wed, 10 Feb 2010 09:00:23 -0800 (PST)
Subject: Please return PQuest training DVDs
Message-ID: <61533.78818.qm@web38908.mail.mud.yahoo.com>

I am down to one.  About 4 were lent out in the last few months.  Please return them.

jim


      


From arkam at stanford.edu  Fri Feb 12 07:03:28 2010
From: arkam at stanford.edu (Arka Majumdar)
Date: Fri, 12 Feb 2010 07:03:28 -0800 (PST)
Subject: Flourine week amnd policy
Message-ID: <1428053246.226681265987008901.JavaMail.root@zm06.stanford.edu>


HI

Is this the Flourine week? I always thought it is the first week of each month. Please let me know.

Thanks
Arka


-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From jimkruger at yahoo.com  Fri Feb 12 07:17:23 2010
From: jimkruger at yahoo.com (jim kruger)
Date: Fri, 12 Feb 2010 07:17:23 -0800 (PST)
Subject: Flourine week and policy    EXCEPTION  next  week
In-Reply-To: <1428053246.226681265987008901.JavaMail.root@zm06.stanford.edu>
Message-ID: <788621.88106.qm@web38905.mail.mud.yahoo.com>

This is Fluorine week.  Monday of the first and 3rd weeks are Wet Clean followed by Cl2 only ( i.e. no F) until Tuesday of the following week.

EXCEPTION .  Because of the Holiday on Monday, the clean will be on Tuesday so exclusive Cl use starts Tuesday night this time.

As always, Cl2 is OK any time if there is no concern for a possible F memory.

 Sputtering of metals is never permitted and use of easily sputtered metal hard masks e.g. GOLD, must be approved (or not) EACH TIME.

jim

--- On Fri, 2/12/10, Arka Majumdar <arkam at stanford.edu> wrote:

> From: Arka Majumdar <arkam at stanford.edu>
> Subject: Flourine week amnd policy
> To: pquest at snf.stanford.edu, "jimkruger" <jimkruger at yahoo.com>
> Date: Friday, February 12, 2010, 7:03 AM
> 
> HI
> 
> Is this the Flourine week? I always thought it is the first
> week of each month. Please let me know.
> 
> Thanks
> Arka
> 
> 
> -- 
> PhD Student
> Ginzton Lab (EE)
> Stanford University
> www.cvitae.org/arkam/
> 


      


From mtang at stanford.edu  Sun Feb 21 05:20:15 2010
From: mtang at stanford.edu (Mary Tang)
Date: Sun, 21 Feb 2010 05:20:15 -0800
Subject: Warning:  No CF4 gas
Message-ID: <4B81330F.8080509@stanford.edu>

Apologies everyone, but it looks like the CF4 cylinder has run dry.  
This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and lampoly.  
We will address this as soon as possible.

Your SNF Staff


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From arkam at stanford.edu  Sun Feb 21 10:53:13 2010
From: arkam at stanford.edu (Arka Majumdar)
Date: Sun, 21 Feb 2010 10:53:13 -0800 (PST)
Subject: I found the pquest is in service mode..but still showed green in
 coral--I canot do anything
Message-ID: <1646124550.2083301266778392975.JavaMail.root@zm06.stanford.edu>



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From mtang at stanford.edu  Mon Feb 22 13:21:47 2010
From: mtang at stanford.edu (Mary Tang)
Date: Mon, 22 Feb 2010 13:21:47 -0800
Subject: Warning:  No CF4 gas
In-Reply-To: <4B81330F.8080509@stanford.edu>
References: <4B81330F.8080509@stanford.edu>
Message-ID: <4B82F56B.1020204@stanford.edu>

Hi all --


The CF4 cylinder has been replaced.  Although the cylinder change is 
routine and no problems are anticipated, staff have not yet run etch 
rates.  Please check before running your critical material and let us 
know if you observe problems.


Your SNF Staff



Mary Tang wrote:
> Apologies everyone, but it looks like the CF4 cylinder has run dry.  
> This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and 
> lampoly.  We will address this as soon as possible.
>
> Your SNF Staff
>
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu