jimkruger at yahoo.com
Wed Mar 3 09:24:07 PST 2010
No Fluorine this week.
The wet cleans are 1st and 3rd Mondays. Fluorine weeks are 2nd and 4th Tuesday until next wet clean. Cl is OK any time if you are not worried about F memory.
The tuning depends on recipe. I am pleased you recognized the different setting.
--- On Wed, 3/3/10, arka majumdar <arka.majumdar at gmail.com> wrote:
> From: arka majumdar <arka.majumdar at gmail.com>
> Subject: Pquest:
> To: "jim kruger" <jimkruger at yahoo.com>
> Date: Wednesday, March 3, 2010, 8:56 AM
> HI Jim
> So this week is also Flourine week--right?
> The tuning stubs in Pquest was way off , when I
> arrived..and I believe that the etch rate is very fast. I am
> etching GaAs. DId you notice anything unusual compared to
> last week..
> Arka Majumdar
> Graduate Student(MS/PhD)
> Ginzton Lab (Vuckovic Group)
> Stanford University
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