From dlee76 at stanford.edu  Mon Nov  1 10:08:50 2010
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Mon, 1 Nov 2010 10:08:50 -0700 (PDT)
Subject: Release my reservation from 13:00 to 16:00
Message-ID: <1773855663.369358.1288631330480.JavaMail.root@zm03.stanford.edu>

Hi all:

My samples are not ready. So, I moved my reservation to next early morning.

Thank you.
Kind Regards,
Donkoun Lee

-- 
Donkoun Lee
 
Ph.D Candidate
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045

Office: (650)-723-2939
Fax: (650)-736-1984





From mtang at stanford.edu  Fri Nov 26 09:04:55 2010
From: mtang at stanford.edu (Mary Tang)
Date: Fri, 26 Nov 2010 09:04:55 -0800
Subject: pquest on chlorine/pquest users group
Message-ID: <4CEFE8B7.5050000@stanford.edu>

Dear pquest users --

At the urgent request of one faculty/group of pquest users, the chamber 
was cleaned on Wednesday and the system is over to chlorine.  If you 
have fluorine processes or processes requiring high chuck temperatures, 
please contact staff and we'll try to coordinate scheduling.

On a related note, there have been some complaints about pquest etch 
performance.  We'd like to convene users together to share results and 
develop a plan to address concerns, including a process qual.  Please 
stay tuned for an announcement.

Thanks,

Mary


From mtang at stanford.edu  Mon Nov 29 21:18:29 2010
From: mtang at stanford.edu (Mary Tang)
Date: Mon, 29 Nov 2010 21:18:29 -0800
Subject: Pquest Users Meeting, Wed. 2 pm
Message-ID: <4CF48925.9000000@stanford.edu>

Hi pquest users --

We'd like to invite pquest users to a meeting to discuss process and 
system needs:  current issues, process monitoring, problem reporting, 
and "chlorine/fluorine" use.  This will be held on Wednesday at 2 pm in 
Allen 201.  If you have experienced problems with pquest, we would 
especially appreciate your sharing your process conditions and results. 
We hope that by sharing data, we more easily identify/resolve current 
problems as well as better prevent them in the future.  If you aren't 
able to make the meeting, please get in touch with Jim Kruger or an etch 
staffer with your concerns beforehand.

Thanks for your attention --

Jim K, Elmer, Mary