From yoneoka at stanford.edu  Thu Oct  7 11:37:14 2010
From: yoneoka at stanford.edu (Shingo Yoneoka)
Date: Thu, 7 Oct 2010 11:37:14 -0700 (PDT)
Subject: Does anyone have Si anisotropic recipe?
In-Reply-To: <906189092.56440.1286476475851.JavaMail.root@zm08.stanford.edu>
Message-ID: <614465238.56617.1286476634465.JavaMail.root@zm08.stanford.edu>

Hello, all.

Does anyone have Si anisotropic recipe in Pquest? I'm currently trying to develo Si anisotropic recipe. I would really appreciate if I could find the recipe that I can refer as a starting point.

Regards,

Shingo



From mtang at stanford.edu  Wed Oct 20 15:09:01 2010
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 20 Oct 2010 15:09:01 -0700
Subject: Fluorine week
Message-ID: <4CBF687D.5080507@stanford.edu>

Hello pquest users --

I've been informed by a patient user that we missed fluorine week last 
week (week of Oct. 11) and instead are well into the third week of 
chlorine.  The problem was that I didn't flip the sign.  My bad. 

Going by the rules, the next fluorine week starts Monday.  But to help 
out this labmember and anyone else who may have been patiently waiting 
for fluorine week, I'd like to propose that starting fluorine week a 
little early, Friday at noon (say) instead of next Monday.  The next 
chamber clean/chlorine week would be Monday, Nov. 1.  Would any chlorine 
users be terribly inconvenienced by not having dedicated chlorine this 
weekend?  If so, please let us know.

I'd also like to ask:  would a Google calendar indicating fluorine 
versus chlorine weeks help?  Let me know.

Thanks for your attention --

Mary


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From gshambat at stanford.edu  Fri Oct 22 10:16:21 2010
From: gshambat at stanford.edu (Gary Shambat)
Date: Fri, 22 Oct 2010 10:16:21 -0700 (PDT)
Subject: Released 12:00-14:00 don't need
Message-ID: <652673648.327994.1287767781671.JavaMail.root@zm01.stanford.edu>



From ntayebi at stanford.edu  Wed Oct 27 12:01:57 2010
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Wed, 27 Oct 2010 12:01:57 -0700 (PDT)
Subject: resist burning
Message-ID: <1406807743.96522.1288206117588.JavaMail.root@zm02.stanford.edu>

Hi all,

Did anyone have a problem with 3612 resist burning in p-quest?  I'm using a recipe based on Cl2 I used before that worked well to etch Si but it's burning my resist. This is the second time it's happening. Let me know if anyone has any suggestion on what is happening.

Thanks

Noureddine


From mtang at stanford.edu  Wed Oct 27 12:08:52 2010
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 27 Oct 2010 12:08:52 -0700
Subject: resist burning
In-Reply-To: <1406807743.96522.1288206117588.JavaMail.root@zm02.stanford.edu>
References: <1406807743.96522.1288206117588.JavaMail.root@zm02.stanford.edu>
Message-ID: <4CC878C4.70808@stanford.edu>

Hi Noureddine --

Could you provide a little more information about your process?

- Which recipe (gas flows, pressure, power, bias, etc.)
- How long is the etch?  How deep?
- Pieces or wafers?  If pieces, how are they mounted?
- Have you always had resist burning or was it just the last two times 
you used this recipe?  When were your etches done?

Thanks,

Mary

Noureddine Tayebi wrote:
> Hi all,
>
> Did anyone have a problem with 3612 resist burning in p-quest?  I'm using a recipe based on Cl2 I used before that worked well to etch Si but it's burning my resist. This is the second time it's happening. Let me know if anyone has any suggestion on what is happening.
>
> Thanks
>
> Noureddine
>   


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu