resist burning

Noureddine Tayebi ntayebi at stanford.edu
Wed Oct 27 12:01:57 PDT 2010


Hi all,

Did anyone have a problem with 3612 resist burning in p-quest?  I'm using a recipe based on Cl2 I used before that worked well to etch Si but it's burning my resist. This is the second time it's happening. Let me know if anyone has any suggestion on what is happening.

Thanks

Noureddine



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