From mtang at stanford.edu  Fri Jul 22 19:04:06 2011
From: mtang at stanford.edu (Mary Tang)
Date: Fri, 22 Jul 2011 19:04:06 -0700
Subject: Chamber clean not done yet
Message-ID: <4E2A2C16.9080408@stanford.edu>

Hi all --

Apologies, but the chamber clean was not done today as originally 
planned (drytek was priority.)  Elmer has it reserved for Monday 
morning.  Until then, it's still officially Fluorine.

One user has reported particle problems on two occasions this week -- 
please let us know if there are other process issues observed.

Thanks,

Mary