Chamber clean not done yet

Mary Tang mtang at stanford.edu
Fri Jul 22 19:04:06 PDT 2011


Hi all --

Apologies, but the chamber clean was not done today as originally 
planned (drytek was priority.)  Elmer has it reserved for Monday 
morning.  Until then, it's still officially Fluorine.

One user has reported particle problems on two occasions this week -- 
please let us know if there are other process issues observed.

Thanks,

Mary





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