From mtang at stanford.edu Tue Nov 1 10:36:06 2011 From: mtang at stanford.edu (Mary Tang) Date: Tue, 01 Nov 2011 10:36:06 -0700 Subject: BCl3 replacement Message-ID: <4EB02E06.3000504@stanford.edu> Hi all -- Apologies for the short notice. As you know, after much cycle purging the BCl3 cylinder installed a few weeks ago had finally been qualified for the standard P5000 metal etch, but because of the earlier issues, we've had some lingering doubts about its integrity. A replacement cylinder has arrived and will be/is being changed out today. The gas line and tool manifolds will be purged of existing gas, just to be sure. A metal etch qualification will be run in p5000etch and this will qualify the cylinder. We do not have a formal qual procedure for the pquest, so pquest users' feedback would be appreciated. For pquest users, there's a regular chamber clean scheduled for this Friday morning which should reset things back to as good as we know; if the pquest user community needs a clean sooner, let us know. Lastly, there's always the possibility that this new cylinder has problems. After all the discussions with our suppliers, I hope to goodness not, but their recent performance leaves something to be desired -- we will keep you posted. Thanks for your attention -- Team Etch From mtang at stanford.edu Tue Nov 1 16:47:47 2011 From: mtang at stanford.edu (Mary Tang) Date: Tue, 01 Nov 2011 16:47:47 -0700 Subject: BCl3 Update Message-ID: <4EB08523.4080506@stanford.edu> Hi all -- Apologies again, as the BCl3 will be delayed a day. The cylinder has been changed, but not yet turned on. There are two ways to check for connection integrity: one way is to use the helium sniffer, which is quick; the other is a 24 hour static pressure check, which is much longer but more complete/definitive. For various reasons, we elected to choose the second. BCl3 should be turned back on and ready for qualification tomorrow afternoon. Thanks for your patience -- Team Etch From armandhr at stanford.edu Wed Nov 2 14:59:35 2011 From: armandhr at stanford.edu (Armand Rundquist) Date: Wed, 2 Nov 2011 14:59:35 -0700 (PDT) Subject: Pquest free 3:30pm - 6pm today In-Reply-To: <68702554.2519397.1320271160214.JavaMail.root@zm08.stanford.edu> Message-ID: <276828590.2519420.1320271175074.JavaMail.root@zm08.stanford.edu> Reservation released due to unavailability of BCl3. From nlatta at stanford.edu Wed Nov 2 17:24:39 2011 From: nlatta at stanford.edu (Nancy Latta) Date: Wed, 02 Nov 2011 17:24:39 -0700 Subject: BCl3 back on Message-ID: <4EB1DF47.6050207@stanford.edu> Hi Everyone, We just wanted to let you know that the BCl3 is operational. We qualified the Al etch process on the p5000etch. Qualification has not been done on the pquest, but we are confident the the new cylinder of BCl3 is fine. Please let us know if you notice any problems. -Team Etch From sgchong at stanford.edu Thu Nov 3 17:43:12 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Thu, 3 Nov 2011 17:43:12 -0700 (PDT) Subject: pquest free tomorrow (11/4) 1-4PM Message-ID: <621927300.3373057.1320367392882.JavaMail.root@zm07.stanford.edu> -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From jimkruger at yahoo.com Thu Nov 17 10:53:37 2011 From: jimkruger at yahoo.com (jim kruger) Date: Thu, 17 Nov 2011 10:53:37 -0800 (PST) Subject: Reports of plasma instability Message-ID: <1321556017.80554.YahooMailNeo@web38906.mail.mud.yahoo.com> I see several recent reports of plasma instability. When making such a report, please include the detailed recipe, such problems are usually very recipe dependent. If? your recipe is having trouble, try a more standard recipe (i.e. oxygen), tune it up, then creep back with the tuning from there to see if your recipe works better.? Include in your report how the standard recipe worked. On most systems, do not run high reflected power for more than ~ 20 seconds while attempting to tune.? Reduce power unttil you can find the tuning values, then increase , re-tuning as you go. High reflected power can degrade the RF generator.? ?????????? The one exception to this is PQuest MICROWAVE POWER (not the RF).? On PQuest, the reflected microwave power is directed to a water-cooled dummy load so will not damage the generator. Thus it is OK to run moderate reflected power if that is the only way to keep things stable.? I believe the only downsides are larger carbon footprint and the blow to your ego that you were not able to make it work better. I am always happy to consult on etch recipes. jim -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Wed Nov 30 09:51:44 2011 From: jimkruger at yahoo.com (jim kruger) Date: Wed, 30 Nov 2011 09:51:44 -0800 (PST) Subject: New Limits on high temperature or Long high power Message-ID: <1322675504.31122.YahooMailNeo@web38905.mail.mud.yahoo.com> With the Kapton tape repair on the wafer clamp, please use caution. Ask Mary Tang or myself before running any recipe above 50 C. Please limit long. high power recipes, in particular, the "Oxygen3" clean. I am hoping 10 minutes will be OK.? Perhaps 20 minutes, but better might be to go 10, wait 10, then 10 minutes again. The consequence of too much heat is likely to be failure of the Kapton adhesive and breakage of your wafer. Ask if you are unsure.? I will try to get an ETA for a replacement teflon part.? We will have to machine our own. jim -------------- next part -------------- An HTML attachment was scrubbed... URL: From zzp at stanford.edu Wed Nov 30 14:14:54 2011 From: zzp at stanford.edu (Zhiping Zhang) Date: Wed, 30 Nov 2011 14:14:54 -0800 (PST) Subject: [PQUEST] delay clean to next Monday In-Reply-To: <1322675504.31122.YahooMailNeo@web38905.mail.mud.yahoo.com> References: <1322675504.31122.YahooMailNeo@web38905.mail.mud.yahoo.com> Message-ID: <7777829DB2EA43238B18B9379A4C111F@stanford.edu> Hi All, This week is the last chance we have fluorine in Pquest before the lab shutdown. I wonder if it is OK to delay the clean to next Monday so we can still run some fluorine recipes this weekend. Please let us know if there is any problem. Thanks, Zhiping -------------- next part -------------- An HTML attachment was scrubbed... URL: