BCl3 Update

Mary Tang mtang at stanford.edu
Tue Nov 1 16:47:47 PDT 2011


Hi all --

Apologies again, as the BCl3 will be delayed a day.  The cylinder has 
been changed, but not yet turned on.  There are two ways to check for 
connection integrity:  one way is to use the helium sniffer, which is 
quick; the other is a 24 hour static pressure check, which is much 
longer but more complete/definitive.  For various reasons, we elected to 
choose the second.  BCl3 should be turned back on and ready for 
qualification tomorrow afternoon.

Thanks for your patience --

Team Etch



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