From mtang at stanford.edu Wed Oct 12 16:14:45 2011 From: mtang at stanford.edu (Mary Tang) Date: Wed, 12 Oct 2011 16:14:45 -0700 Subject: p5000etch and pquest updates Message-ID: <4E961F65.8090500@stanford.edu> Hi all -- Just so you know.... It's been determined that the BCl3 bottle installed just last week really isn't BCl3. The etches were bad and the plasma color is off. We're trying to expedite another bottle. It appears that our supplier has undergone some organizational changes and is subcontracting their etch gases -- this is the third etch cylinder in the last three months we've received that has been bad. Needless to say, there will be measures taken. We will update everyone as we learn more. In the meantime, Elmer and Cesar have removed the turbocontroller from p5000etch ChA (since there is no BCl3) and placed it on ChB to get that up and running. A new turbocontroller is expected any day, though probably moot until we get some BCl3. Our apologies -- Team Etch (Elmer, Cesar, Nancy, Mary) -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Fri Oct 14 14:27:27 2011 From: mtang at stanford.edu (Mary Tang) Date: Fri, 14 Oct 2011 14:27:27 -0700 Subject: BCl3 status on P5000etch and pquest Message-ID: <4E98A93F.3070500@stanford.edu> Hi all -- BCl3 has been turned back on P5000etch and Pquest. No, this is not the new cylinder, which is still in transit from the East Coast (no delivery date as yet). This is the same cylinder which we received and found to be contaminated. BCl3 is a low vapor pressure liquid source (4.4 psig) and we were able to determine that the cylinder appears to have been charged with an apparently innocuous gas. Elmer did extensive pumping on the cylinder to flush the gas and purged the gas lines. The plasma has returned to a normal color and Nancy's Al etch rate qual on p5000etch now looks really good. Full disclosure: by available measures, the BCl3 appears to be OK. However, this experience leaves some concern about the integrity of this cylinder, so we still plan to replace this cylinder with the new one when it arrives, to put any lingering doubts to rest. Please make sure to run a test sample before committing your own material to a critical etch. Please also report any issues on Coral. And by the way, P5000etch users: ChA is back online with a replacement turbo controller. Thanks for your attention and patience -- Team Etch -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From usharaghuram at gmail.com Sat Oct 22 18:41:42 2011 From: usharaghuram at gmail.com (Usha Raghuram) Date: Sat, 22 Oct 2011 18:41:42 -0700 Subject: Pquest - Wafer broke Message-ID: Wafer broke and a piece is till inside the chamber. Sorry for the inconvenience. Usha -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Wed Oct 26 10:22:25 2011 From: mtang at stanford.edu (Mary Tang) Date: Wed, 26 Oct 2011 10:22:25 -0700 Subject: Facilities work is completed Message-ID: <4EA841D1.4060005@stanford.edu> Hi all -- Facilities work is completed ahead of schedule. These systems are again available for use. Team Etch -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu