Hi all, I'm trying to etch ~20nm of Cr using a plasma etch. Looking at the literature, it looks like I need a Cl/O plasma. Does anyone have experience etching Cr? Thanks, Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: <http://snf.stanford.edu/pipermail/pquest/attachments/20120413/30e8c1a6/attachment.html>