Cr etching

Scott Lee wslee at stanford.edu
Fri Apr 13 11:11:30 PDT 2012


Hi all,

I'm trying to etch ~20nm of Cr using a plasma etch. Looking at the
literature, it looks like I need a Cl/O plasma. Does anyone have experience
etching Cr?

Thanks,
Scott
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/pquest/attachments/20120413/30e8c1a6/attachment.html>


More information about the pquest mailing list