Fluorine time extended to Monday

Mary Tang mtang at stanford.edu
Thu Jul 26 15:58:45 PDT 2012

Hello pquest users --

No one has voiced any objection to extending the fluorine time to Monday 
morning, so it's now official -- the chamber clean will be on Monday 
morning.  Jim Kruger has generously volunteered to run a test before and 
after the clean to get some data on the tool baseline, so I'll leave the 
reservation for Friday morning.

Thanks all!


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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