Fluorine time extended to Monday

Mary Tang mtang at stanford.edu
Thu Jul 26 15:58:45 PDT 2012


Hello pquest users --

No one has voiced any objection to extending the fluorine time to Monday 
morning, so it's now official -- the chamber clean will be on Monday 
morning.  Jim Kruger has generously volunteered to run a test before and 
after the clean to get some data on the tool baseline, so I'll leave the 
reservation for Friday morning.

Thanks all!

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




More information about the pquest mailing list