From mtang at stanford.edu  Thu Jun 14 13:06:32 2012
From: mtang at stanford.edu (Mary Tang)
Date: Thu, 14 Jun 2012 13:06:32 -0700
Subject: Make sure to use EBR!!!
Message-ID: <4FDA4448.5080103@stanford.edu>

Dear Pquest users:

There has been a rash of stuck wafers in the system.  There is some 
suspicion that this may be due to trace amounts of resist that get stuck 
on the wafer clamp fingers when they press down on the wafer during 
processing.  Then that wafer -- or a subsequent wafer -- can get stuck 
to the clamp fingers.  Since there seems to be an increase in the number 
of people doing hot chuck processing, we suspect that this may cause the 
resist to get soft and sticky, possibly resulting in more stuck wafers.

Please make sure to use 5 mm EBR (Edge Bead Removal) on your wafers.  
Remember, you should select this option on the SVGCoat track program.  
Do not skip the EBR process.   Do not use the 2 mm EBR (the clamp 
fingers will overlap.)  If you have a special need for no-EBR 
processing, make sure to do this on days where we have maintenance 
coverage to rescue your wafer.  (It would also be courteous to let Elmer 
or Mike know in advance, as well.)

Thanks for your attention --

Team Etch

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From justinwu at stanford.edu  Thu Jun 14 18:52:20 2012
From: justinwu at stanford.edu (Justin Zachary Wu)
Date: Thu, 14 Jun 2012 18:52:20 -0700 (PDT)
Subject: 11:30-1:30 pquest free
In-Reply-To: <756651616.11089249.1339724836829.JavaMail.root@zm04.stanford.edu>
Message-ID: <794996341.11094526.1339725140950.JavaMail.root@zm04.stanford.edu>

Sample has some problems.


From elmere at stanford.edu  Tue Jun 19 14:17:55 2012
From: elmere at stanford.edu (Elmer Enriquez)
Date: Tue, 19 Jun 2012 14:17:55 -0700
Subject: Recipe change to eliminate the microwave generator overload problem
Message-ID: <4FE0EC83.2050107@stanford.edu>

To all users,
     The staff is recommending that a small recipe change be made to 
your recipes in order to eliminate the occurrence of the microwave 
generator overload fault.  The recommendation is to insert a "microwave 
turn on step" right before the main etch step of your recipe.  Please do 
the following :  1) Copy the stabilization step prior the main etch 
step.  2)  Insert the copied step between the stabilization step and the 
main etch step.  3) In the inserted step, change the ECR power from 0 to 
1 W and change the process time to 5 seconds


From vijayn at stanford.edu  Mon Jun 25 11:42:40 2012
From: vijayn at stanford.edu (Vijay Kris Narasimhan)
Date: Mon, 25 Jun 2012 11:42:40 -0700 (PDT)
Subject: Take my time
Message-ID: <1263222420.27485684.1340649760545.JavaMail.root@zm02.stanford.edu>

I won't be using the time between now and 1PM. 
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From zzp at stanford.edu  Thu Jun 28 10:39:38 2012
From: zzp at stanford.edu (Zhiping Zhang)
Date: Thu, 28 Jun 2012 10:39:38 -0700 (PDT)
Subject: PQUEST stay Florine over the weeekend?
Message-ID: <1048070038.56451290.1340905178046.JavaMail.root@zm01.stanford.edu>

Hi all,

Due to the downtime of ASML and also Pquest this week, my wafers cannot be processed in time. I would like to ask the staff to delay the clean cycle to Monday and make PQuest stay Florine till then? Please let me know if there is any problem.

thank you very much,
Zhiping


From vijayn at stanford.edu  Thu Jun 28 17:21:19 2012
From: vijayn at stanford.edu (Vijay Kris Narasimhan)
Date: Thu, 28 Jun 2012 17:21:19 -0700
Subject: PQUEST stay Florine over the weeekend?
Message-ID: <s6wb0nbw3kyxtenrrigdomk2.1340929279003@email.android.com>

I would like fluorine too!

Sent from my Verizon Wireless Phone

Zhiping Zhang <zzp at stanford.edu> wrote:

>Hi all,
>
>Due to the downtime of ASML and also Pquest this week, my wafers cannot be processed in time. I would like to ask the staff to delay the clean cycle to Monday and make PQuest stay Florine till then? Please let me know if there is any problem.
>
>thank you very much,
>Zhiping

From mtang at stanford.edu  Thu Jun 28 17:28:05 2012
From: mtang at stanford.edu (Mary Tang)
Date: Thu, 28 Jun 2012 17:28:05 -0700
Subject: Fluorine until Monday, July 2
Message-ID: <4FECF695.7090401@stanford.edu>

Hi all --

As per Zhiping's request and three more "yes" votes from people with 
reservations this weekend, the pquest chamber wet clean will be 
postponed until Monday morning (July 2).  We will go back to the posted 
schedule (next clean, Friday, July 13.)

Thanks all --

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu