Recipe change to eliminate the microwave generator overload problem

Elmer Enriquez elmere at stanford.edu
Tue Jun 19 14:17:55 PDT 2012


To all users,
     The staff is recommending that a small recipe change be made to 
your recipes in order to eliminate the occurrence of the microwave 
generator overload fault.  The recommendation is to insert a "microwave 
turn on step" right before the main etch step of your recipe.  Please do 
the following :  1) Copy the stabilization step prior the main etch 
step.  2)  Insert the copied step between the stabilization step and the 
main etch step.  3) In the inserted step, change the ECR power from 0 to 
1 W and change the process time to 5 seconds



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