From nlatta at stanford.edu  Tue Mar 13 13:52:51 2012
From: nlatta at stanford.edu (Nancy Latta)
Date: Tue, 13 Mar 2012 13:52:51 -0700
Subject: No Cl or HBr on Wed and Thurs
Message-ID: <4F5FB3A3.6060007@stanford.edu>

Labmembers,

Cl and HBr will not be available to the etchers starting 6:00am Wed 
until 12:00pm on Thurs.  This will allow for repairs on the corrosives 
vault in the gas bunker.

If there is any change in this schedule we will notify you.

Team Etch


From mtang at stanford.edu  Tue Mar 20 14:33:39 2012
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 20 Mar 2012 14:33:39 -0700
Subject: Chlorine and HBr shutdown, Thur am-Fri noon
Message-ID: <4F68F7B3.3040004@stanford.edu>

Dear pquest-, p5000etch- and lampoly- users --

The duct work in the corrosives gas vault has been rescheduled.  So 
please be aware that from Thursday morning through Friday around noon, 
chlorine and hydrogen bromide will be unavailable.  I've reserved the 
tools, just to flag this, but tools should be otherwise usable for other 
chemistries.

Thanks for your attention and apologies for the inconvenience --

Your SNF Staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From mtang at stanford.edu  Wed Mar 21 15:14:23 2012
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 21 Mar 2012 15:14:23 -0700
Subject: Fluorine time
Message-ID: <4F6A52BF.4030400@stanford.edu>

Hi all --

Since Cl2 will be unavailable from Thursday am thru Friday noon, it 
seems reasonable to call it fluorine week.  There's chamber clean 
schedule for Friday am, so we'll be back on chlorine week after the clean.

Thanks all, for your patience --

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From ytcheng at stanford.edu  Thu Mar 29 10:36:29 2012
From: ytcheng at stanford.edu (Yao-Te Cheng)
Date: Thu, 29 Mar 2012 10:36:29 -0700
Subject: PQuest released 2-5pm
Message-ID: <000701cd0dd2$798cb450$6ca61cf0$@stanford.edu>

Sorry for late notice.