Chlorine and HBr shutdown, Thur am-Fri noon

Mary Tang mtang at stanford.edu
Tue Mar 20 14:33:39 PDT 2012


Dear pquest-, p5000etch- and lampoly- users --

The duct work in the corrosives gas vault has been rescheduled.  So 
please be aware that from Thursday morning through Friday around noon, 
chlorine and hydrogen bromide will be unavailable.  I've reserved the 
tools, just to flag this, but tools should be otherwise usable for other 
chemistries.

Thanks for your attention and apologies for the inconvenience --

Your SNF Staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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