Chlorine and HBr shutdown, Thur am-Fri noon

Mary Tang mtang at
Tue Mar 20 14:33:39 PDT 2012

Dear pquest-, p5000etch- and lampoly- users --

The duct work in the corrosives gas vault has been rescheduled.  So 
please be aware that from Thursday morning through Friday around noon, 
chlorine and hydrogen bromide will be unavailable.  I've reserved the 
tools, just to flag this, but tools should be otherwise usable for other 

Thanks for your attention and apologies for the inconvenience --

Your SNF Staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

More information about the pquest mailing list