From jimkruger at yahoo.com  Wed Nov  7 12:55:36 2012
From: jimkruger at yahoo.com (jim kruger)
Date: Wed, 7 Nov 2012 12:55:36 -0800 (PST)
Subject: PQuest Improved Load Lock venting
Message-ID: <1352321736.31445.YahooMailNeo@web161003.mail.bf1.yahoo.com>

Thanks to Mike and Elmer, the Load Lock vent on PQuest has been adjusted.
It should no longer be necessary to "leave the "Pruge" on" , as well as no difficulty after System Reset.

Happy Etching,

jim
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From vijayn at stanford.edu  Wed Nov  7 13:00:53 2012
From: vijayn at stanford.edu (Vijay Kris Narasimhan)
Date: Wed, 7 Nov 2012 13:00:53 -0800 (PST)
Subject: PQuest Improved Load Lock venting
In-Reply-To: <1352321736.31445.YahooMailNeo@web161003.mail.bf1.yahoo.com>
Message-ID: <1573281993.14358778.1352322053737.JavaMail.root@stanford.edu>

Thanks!! 

----- Original Message -----

From: "jim kruger" <jimkruger at yahoo.com> 
To: "pquest" <pquest at snf.stanford.edu> 
Sent: Wednesday, November 7, 2012 12:55:36 PM 
Subject: PQuest Improved Load Lock venting 



Thanks to Mike and Elmer, the Load Lock vent on PQuest has been adjusted. 
It should no longer be necessary to "leave the "Pruge" on" , as well as no difficulty after System Reset. 


Happy Etching, 


jim 

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From mtang at stanford.edu  Wed Nov  7 16:45:37 2012
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 07 Nov 2012 16:45:37 -0800
Subject: Request to extend Fluorine week, 11/16
Message-ID: <509B00B1.1000803@stanford.edu>

Hi pquest users --

There's a request from a user on a deadline to extend the next fluorine 
week, so that the chamber wet clean which would normally be done on 
Friday, 11/16, at 7 am, would be done on Monday, 11/19, at 7 am.  Does 
anyone have any objections to this request?  If so, please let me know 
by this Friday, so that our requester (and we) can make plans accordingly.

Thanks,

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From mtang at stanford.edu  Sat Nov 10 08:04:22 2012
From: mtang at stanford.edu (Mary Tang)
Date: Sat, 10 Nov 2012 08:04:22 -0800
Subject: Fluorine week extended from 11/16
Message-ID: <509E7B06.60102@stanford.edu>

Hi all pquest users --

As there has been no objection (and in fact, one other "yay"), fluorine 
week for next week will be extended from 11/16 through the weekend.  The 
chamber wet clean is scheduled for 11/19, Monday morning.

Thanks all --

Team Etch


From wslee at stanford.edu  Tue Nov 20 07:36:21 2012
From: wslee at stanford.edu (Scott Lee)
Date: Tue, 20 Nov 2012 07:36:21 -0800
Subject: free till 10:30am, finished early [eom]
Message-ID: <CAC8qUHAfdmACHxAFmqNCJaex46NTnksuaaFVc4W=4hQv7WASPA@mail.gmail.com>


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From chienyuc at stanford.edu  Tue Nov 20 08:45:42 2012
From: chienyuc at stanford.edu (Chien-Yu Chen)
Date: Tue, 20 Nov 2012 08:45:42 -0800 (PST)
Subject: pquest release Tue 11:30-1pm
Message-ID: <1498012864.1772698.1353429942952.JavaMail.root@stanford.edu>

Sample finished yesterday; sorry for late notice.

Chien-Yu


From wslee at stanford.edu  Mon Nov 26 12:50:48 2012
From: wslee at stanford.edu (Scott Lee)
Date: Mon, 26 Nov 2012 12:50:48 -0800
Subject: Fwd: Metal and Dielectric Etch Discussion
In-Reply-To: <50B3AB79.1080203@stanford.edu>
References: <50B3AB79.1080203@stanford.edu>
Message-ID: <CAC8qUHDi5WAUs-7v5Q6a8B91AHMFSLe3AyRqwpVCL0QXDt6txA@mail.gmail.com>

See message from Ed about metal and dielectric etch meeting. I am
forwarding this to the pquest list since many people use pquest as a
Au-contaminated etcher for metals. The meeting is not about the new III-V
etcher.

Scott

---------- Forwarded message ----------
From: Ed Myers <edmyers at stanford.edu>
Date: Mon, Nov 26, 2012 at 9:48 AM
Subject: Metal and Dielectric Etch Discussion
To: p5000etch at snf.stanford.edu, amtetcher at snf.stanford.edu
Cc: "Roger T. Howe" <rthowe at stanford.edu>, John Bumgarner <
jwb2005 at stanford.edu>, mary tang <mtang at stanford.edu>, Nancy Latta <
nlatta at stanford.edu>


All,

I would like to meet at 10am on Monday, Dec. 3rd in 101 Allen to discuss
the PlasmaTherm metal and dielectric etch systems.  As many of you know the
PlasmaTherm DRIE system has completed it's acceptance.  This means, it is
now available for process characterization.  I would like to meet with the
etch community to discuss the process needs for the PlasmaTherm systems.

Please come to discuss your process needs and what needs to happen on the
PlasmaTherm systems.  If you know anyone who needs etches that have not
been supported in the past, please make sure they are invited.

Regards,
Ed
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From mtang at stanford.edu  Fri Nov 30 13:13:18 2012
From: mtang at stanford.edu (Mary Tang)
Date: Fri, 30 Nov 2012 13:13:18 -0800
Subject: Fluorine time extended to 12/3
Message-ID: <50B9216E.80707@stanford.edu>

Dear PQuest users --

My bad, I made the reservation for the chamber clean for the wrong day, 
so the clean did not happen this morning.  It is scheduled for Monday, 
12/3.  My sincere apologies if this has messed up anyone's process plans 
for the weekend.

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu