Request to extend Fluorine week, 11/16

Mary Tang mtang at
Wed Nov 7 16:45:37 PST 2012

Hi pquest users --

There's a request from a user on a deadline to extend the next fluorine 
week, so that the chamber wet clean which would normally be done on 
Friday, 11/16, at 7 am, would be done on Monday, 11/19, at 7 am.  Does 
anyone have any objections to this request?  If so, please let me know 
by this Friday, so that our requester (and we) can make plans accordingly.



Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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