BCl3 Heat Trace Tie-In

Ed Myers edmyers at stanford.edu
Thu Sep 6 16:14:26 PDT 2012


In order to complete the installation of the BCl3 to the new etchers we 
need to tie-in to the piping heat trace system.  While we expect this to 
be very quick (<30min) and not noticeable at the tool, we want to give 
everyone a warning.  The tie-in is scheduled for Friday, Sept. 7th at 
2pm.  If you are running a BCl3 etch recipe, you may want to keep a 
careful eye on the BCl3 flow or be more cautious and reschedule you 
equipment reservation.

I made a blocking reservation on the P5000etch system and I will contact 
the person with a reservation on the pquest to discuss the process in 
more detail

Ed Myers

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