BCl3 Heat Trace Tie-In

Ed Myers edmyers at stanford.edu
Fri Sep 7 14:40:00 PDT 2012


All,

The tie-in has been completed.  We observed a 1 degree F temperature 
drop during the tie-in.  This should not have caused any concerns, but 
please monitor your gas flows as always.

Regards,
Ed

On 9/6/2012 4:14 PM, Ed Myers wrote:
> All,
>
> In order to complete the installation of the BCl3 to the new etchers 
> we need to tie-in to the piping heat trace system.  While we expect 
> this to be very quick (<30min) and not noticeable at the tool, we want 
> to give everyone a warning.  The tie-in is scheduled for Friday, Sept. 
> 7th at 2pm.  If you are running a BCl3 etch recipe, you may want to 
> keep a careful eye on the BCl3 flow or be more cautious and reschedule 
> you equipment reservation.
>
> I made a blocking reservation on the P5000etch system and I will 
> contact the person with a reservation on the pquest to discuss the 
> process in more detail
>
> Regards,
> Ed Myers




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