BCl3 Heat Trace Tie-In
edmyers at stanford.edu
Fri Sep 7 14:40:00 PDT 2012
The tie-in has been completed. We observed a 1 degree F temperature
drop during the tie-in. This should not have caused any concerns, but
please monitor your gas flows as always.
On 9/6/2012 4:14 PM, Ed Myers wrote:
> In order to complete the installation of the BCl3 to the new etchers
> we need to tie-in to the piping heat trace system. While we expect
> this to be very quick (<30min) and not noticeable at the tool, we want
> to give everyone a warning. The tie-in is scheduled for Friday, Sept.
> 7th at 2pm. If you are running a BCl3 etch recipe, you may want to
> keep a careful eye on the BCl3 flow or be more cautious and reschedule
> you equipment reservation.
> I made a blocking reservation on the P5000etch system and I will
> contact the person with a reservation on the pquest to discuss the
> process in more detail
> Ed Myers
More information about the pquest