From mtang at snf.stanford.edu Mon Dec 3 09:33:35 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 03 Dec 2001 09:33:35 -0800 Subject: Weekly Report Message-ID: <3C0BB76F.E3A0A410@snf.stanford.edu> For 11/30. Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: WR11-30.doc Type: application/msword Size: 48640 bytes Desc: not available URL: From mahnaz at snf.stanford.edu Tue Dec 4 09:08:00 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 04 Dec 2001 09:08:00 -0800 Subject: weekly report Message-ID: <3C0D02F0.31FFC2F@snf.stanford.edu> -------------- next part -------------- A non-text attachment was scrubbed... Name: report11-26.doc Type: application/msword Size: 22016 bytes Desc: not available URL: From latta at snf.stanford.edu Wed Dec 5 11:17:06 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 05 Dec 2001 11:17:06 -0800 Subject: Weekly report 27-30 Nov Message-ID: <3C0E72B2.B87E18FC@snf.stanford.edu> Here it is, better late than never.... -------------- next part -------------- A non-text attachment was scrubbed... Name: 27 -30 Nov.doc Type: application/msword Size: 24576 bytes Desc: not available URL: From hphan at snf.stanford.edu Fri Dec 7 17:21:42 2001 From: hphan at snf.stanford.edu (Henry Phan) Date: Fri, 07 Dec 2001 17:21:42 -0800 Subject: Weekly Report Message-ID: <3C116B26.72B7F362@snf.stanford.edu> Hi all: Here is my weekly report. You all have a nice weekend!! -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: Weekly Report.doc Type: application/msword Size: 33280 bytes Desc: not available URL: From latta at snf.stanford.edu Fri Dec 7 17:51:29 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 07 Dec 2001 17:51:29 -0800 Subject: Nancy's 3-7 Dec report Message-ID: <3C117221.35647CEC@snf.stanford.edu> Here it is.... -------------- next part -------------- A non-text attachment was scrubbed... Name: 3-7 Dec.doc Type: application/msword Size: 24576 bytes Desc: not available URL: From jperez at snf.stanford.edu Mon Dec 10 07:25:59 2001 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Mon, 10 Dec 2001 07:25:59 -0800 Subject: Weekly Report Message-ID: <3C14D407.AD52A455@snf.stanford.edu> -------------- next part -------------- A non-text attachment was scrubbed... Name: Weekly Report8.doc Type: application/msword Size: 27648 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon Dec 10 09:07:41 2001 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 10 Dec 2001 09:07:41 -0800 Subject: Weekly report for December 7, 2001 Message-ID: <3C14EBDD.305CAFE8@snf.stanford.edu> WEEKLY REPORT FOR THE WEEK OF DECEMBER 7, 2001 JAMES CONWAY CIS-31 650-725-7075 THIS WEEK: Monday completed Stanford 101 and began learning and working through the various Stanford systems. REQUIRE a Stanford ID# and PIN so I can set up benefits and insurance and complete many forms required from me. (Benefits, insurance parking, ID card, SUNet ID, access and keys, etc.) Upon my arrival all systems were down and not available to SNF users or staff. I have reviewed the systems status and needs and am currently roughing out a timeline and task plan for success through Feb. 1, 2001. Equipment Status: Hitachi S-800: Down for PM and FE tip change out. Expected update Monday 12-17, if not sooner. We are going over this system completely with Jamel from Hitachi, and will quickly bring this system into specification, and recalibrate the line measurement section to NIST traceable standards, before releasing it back for general use. (ASAP) Evaluation is currently underway to identify several factors affecting the performance of this heavily used instrument towards improving up-time, reliability, and performance of this SNF workhorse. Hitachi S-4160 SEM: Reviewed drawings and requirements for the Stand and Supports with TMC engineering resolving several issues and eliminating confusions and communication issues apparent. We are now on the same page and should have final version of drawings finished Tuesday 12-11-01, fabrication should also begin next week once we give the final OK. With minor support from Hitachi we should have this installation complete and hopefully the system up and running in late January. Hitachi 700F E-beam Lithography System: Down hard on several issues since August 28, 2001. Troubleshooting of wiring harnesses and circuits is underway as well as reading the ample documentation. This activity will intensify over the next few weeks. The goal is to have a full system up and running ASAP and certainly before the Spring Term starts in January if humanly possible. Many challenges remain to be resolved on this platform. This is my highest priority task at hand and some outside support will be soon required. Hitachi S-2500 (Microstructures Group CIS-X) I have made a decision to make this SEM available to qualified users within SNF whom will complete a simple qualification and training session on a limited escorted basis. This system is up and performing optimally, and currently exceeds manufacturers' specifications. I am available weekly on Thursdays from 3-5:30 PM, CIS-X B105, for training for all interested parties. This is a emergency measure to ensure we have no roadblocks to critical work in progress due to lack of a SEM. Outside industrial users will be referred to outside resources available to them. Next Week: - A diligent effort will be made with my primary focus directed towards troubleshooting and effecting repairs to the Hitachi 700-F E-beam writing system. Further contact with Hitachi will be made to identify qualified field service technicians and gain further engineering support to bring this system back on line with their help. - Finalize and complete all necessary task for TMC to begin fabrication of the Stands and Support structure for the Hitachi S-4160 platform installation. - Develop and timeline and task plan for the all activities through February 1, 2001 related to getting all systems up and running . This is in order to provide complete focus on the task at hand as the Raith system arrives in February for installation and qualification. Initial conversations with Raith have been very positive. Everyone at SNF: Thank you for the very warm welcome to SNF this week! After lurking in the hallways and the basement of CIS-X since May 99 it is very nice to now have become a member of the staff at SNF. Your comments, criticism, and suggestions from anyone about anything is welcome at any time. Late Friday afternoons are often spent "Causing Trouble by Walking Around" (CTBWA) which is my form of "Management By Walking Around". (MBWA) A habit impressed upon me by David Packard and Barney Oliver during my tenure at Hewlett-Packard Labs. MY DOOR IS ALWAYS OPEN! JWC From mahnaz at snf.stanford.edu Mon Dec 10 09:10:52 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 10 Dec 2001 09:10:52 -0800 Subject: weekly report Message-ID: <3C14EC9C.43C9511@snf.stanford.edu> -------------- next part -------------- A non-text attachment was scrubbed... Name: report12-3.doc Type: application/msword Size: 22528 bytes Desc: not available URL: From maurice at snf.stanford.edu Mon Dec 10 09:50:33 2001 From: maurice at snf.stanford.edu (maurice stevens) Date: Mon, 10 Dec 2001 09:50:33 -0800 Subject: Maurice's Weekly report 12/10/01 Message-ID: <3C14F5E9.E63B26C2@snf.stanford.edu> Please see attached. -- Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 maurice at stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: wr12_10_01.doc Type: application/msword Size: 24576 bytes Desc: not available URL: From uli at snf.stanford.edu Mon Dec 10 17:37:29 2001 From: uli at snf.stanford.edu (Uli Thumser) Date: Mon, 10 Dec 2001 17:37:29 -0800 Subject: Uli's weekly report Dec 3 Message-ID: <3C156359.843A8F64@snf.stanford.edu> -- Uli Thumser Stanford Nanofabrication Facility Center for Integrated Systems 420 Via Palou Mall, CIS Room 146 Stanford, CA 94305 (650)725-3694 uli at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: Weekly Report Dec 3.doc Type: application/msword Size: 27648 bytes Desc: not available URL: From gladys at snf.stanford.edu Mon Dec 10 18:09:36 2001 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mon, 10 Dec 2001 18:09:36 -0800 Subject: Weekly Report Message-ID: <3C156AE0.679B6572@snf.stanford.edu> -------------- next part -------------- A non-text attachment was scrubbed... Name: 1_Weekly Repor1.doc Type: application/msword Size: 20992 bytes Desc: not available URL: From mtang at snf.stanford.edu Mon Dec 10 19:32:19 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 10 Dec 2001 19:32:19 -0800 Subject: Weekly Report Message-ID: <3C157E43.B912978F@snf.stanford.edu> Better late than neverending. M -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: WR12-7.doc Type: application/msword Size: 50688 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri Dec 14 09:23:02 2001 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 14 Dec 2001 09:23:02 -0800 Subject: E-Beam and SEM Lab Cleanup in progress. Pick up your engineering materials... Message-ID: <3C1A3576.30A36BE3@snf.stanford.edu> Hello E-beam and Process Users Groups: Currently we are beginning efforts to reorganize and improve the SEM and E-beam Lab areas here at SNF. This includes some construction and a major housekeeping effort in the SEM and E-beam areas beginning next week. You are requested to remove your personal items, engineering materials and any samples you wish to retain from these areas as soon as possible to aid in these activities. BE WARNED herein that any and all unidentified engineering materials that remain in these lab areas will be considered 'donated to the lab' and may be removed, discarded or utilized as needed to students in the coming term. In addition if you have unused or excess equipment, sample preparation supplies, SEM mounts, etc. that may be useful to our activities in this lab by all means please contact me directly. If you should have any issues or questions please contact me directly. Thank you for your support. James Conway SNF 650-725-7075 jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jperez at snf.stanford.edu Mon Dec 17 08:10:17 2001 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Mon, 17 Dec 2001 08:10:17 -0800 Subject: Weekly Report Dec.10-14 Message-ID: <3C1E18E9.A04ACDCB@snf.stanford.edu> -------------- next part -------------- A non-text attachment was scrubbed... Name: Weekly Report9.doc Type: application/msword Size: 27136 bytes Desc: not available URL: From hphan at snf.stanford.edu Mon Dec 17 08:10:40 2001 From: hphan at snf.stanford.edu (Henry Phan) Date: Mon, 17 Dec 2001 08:10:40 -0800 Subject: Weekly Report Message-ID: <3C1E1900.4662399F@snf.stanford.edu> Hi All: Here is my weekly report..... -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: Weekly Report.doc Type: application/msword Size: 34304 bytes Desc: not available URL: From mahnaz at snf.stanford.edu Mon Dec 17 09:46:48 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 17 Dec 2001 09:46:48 -0800 Subject: weekly report Message-ID: <3C1E2F88.BFE1A60E@snf.stanford.edu> Here it is -------------- next part -------------- A non-text attachment was scrubbed... Name: report12-10.doc Type: application/msword Size: 21504 bytes Desc: not available URL: From maurice at snf.stanford.edu Mon Dec 17 10:28:25 2001 From: maurice at snf.stanford.edu (maurice stevens) Date: Mon, 17 Dec 2001 10:28:25 -0800 Subject: Maurice's Weekly stuff Message-ID: <3C1E3949.30159FE9@snf.stanford.edu> Please see attached. Happy Holidays. Let's all eat lots of food next week and come back in good moods!! -- Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 maurice at stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: wr12_17_01.doc Type: application/msword Size: 27648 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon Dec 17 11:18:04 2001 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 17 Dec 2001 11:18:04 -0800 Subject: Weekly Report for December 14, 2001 Message-ID: <3C1E44EC.C2859CA6@snf.stanford.edu> Weekly Report for December 14, 2001 James Conway 650-725-7075 This Week: E-Beam Lithography: Major effort was directed towards getting repairs made to the Hitachi 700-F E-beam Lithography system. We went over much of the systems SAMP, PAMP, and PNL boards finding some unusual functionality with the logic control circuits. This prevents switching from the SEM X-Y imaging mode to the Aperture image modes during automatic operation. I am bringing more electrical support to aid in repair of this system and will contact Hitachi for further support in the New Year. SEM: Hitachi S-800 came back up late Friday after a tip replacement. Imaging is looking good. Now available to all users. Assisted Mike Whitbrott and Eric Perrozziello with their SEM work this week on the Hitachi S-2500 platform in the Microstructures Group, to aid in catching up to the schedule. Time line for installation of the other SEM and E-beam platforms been roughed out. Next Week: - Repairs to the Hitachi S-800 E-beam Lithography System continues... - More active participation in coordinating scheduling on the S-800 Hitachi SEM (semhitachi) will occur to improve accessibility and utilization of this platform for all users. There has been some "sandbagging" of the schedule this coming week which I will address with individual users. Please only schedule the amount of time you actually need for your work on this heavily used system. -Begin outlining and brainstorming for the Cornell E-Beam Lithography workshop scheduled for Jan. 14, 2001 where we will present an update on E-beam related activities here at Stanford. A meeting will be scheduled for inputs from Sr. Staff to this task later this week. Your inputs for content, images and devices made using the E-beam Lithography system are requested. -Lab Housekeeping and organization in preparation for the Holiday Shutdown will occur through the week. It is requested that all process staff which may have engineering materials in the S-800 SEM area pick up their stuff, so we can clean up this area. Thank you for your support! James Conway 650-725-7075 From latta at snf.stanford.edu Mon Dec 17 11:35:30 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 17 Dec 2001 11:35:30 -0800 Subject: Nancy's weekly report, 10-14 Dec Message-ID: <3C1E4902.B66DF1FE@snf.stanford.edu> Here it is. -------------- next part -------------- A non-text attachment was scrubbed... Name: 3-7 Dec.doc Type: application/msword Size: 30208 bytes Desc: not available URL: From latta at snf.stanford.edu Mon Dec 17 12:16:33 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 17 Dec 2001 12:16:33 -0800 Subject: Holiday Cheer! Message-ID: <3C1E52A1.95B6A708@snf.stanford.edu> Folks, Beth Pruitt has given us a box of holiday candies to enjoy. It is located next to the espresso macine in the Jeannie, Uli, Henry office. Please help me spread the word to the maint folks, the shipping and receivingfolks, the admin folks and the computer folks. Who have I forgotten?..... And thanks to Beth! Nancy From jwc at snf.stanford.edu Wed Dec 19 10:06:47 2001 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 19 Dec 2001 10:06:47 -0800 Subject: semhitachi down thru afternoon FRIDAY Message-ID: <3C20D737.316EAF0A@snf.stanford.edu> Greetings, As only luck would have it the Hitachi S-800 is again down due to problems in the high vacuum gun area. Pressures became too high for the FE tip to remain stable and the high voltage power supply shut down to protect itself. We are now baking out the system again and the system will likely come up tomorrow afternoon. I request everyone be especially careful about cleanliness in samples being put into this system. IF YOU ARE IMAGING PHOTORESIST OF ANY KIND OR POLYMERICS, PLEASE BAKE OUT YOUR SAMPLES AND DEGAS THEM IF POSSIBLE BEFORE PLACING THEM IN THE SYSTEM. Also if you are working on samples that have a lot of junk on the edges go ahead and use a Q-tip or wiper to remove all residues and then bake them out before introducing them into the SEM. Secondly please be very kind to the vacuum system on loading your sample. Allow the SEC (Specimen Exchange Chamber) to fully pump down 1 MINUTE AFTER GREEN LIGHT STATUS before SLOWLY OPENING MV1 to introduce your sample into the SC (Specimen Chamber). This will aid in reducing harsh changes to the vacuum environment. Thirdly upon flashing if you observe less than 20 -25 uA of current on the upper dial during flashing at No 3 flashing selection, repeat the flashing sequence and if it doesn't come up to around 30 uA or more, come find me immediately. I wish to monitor this situation closely to identify the root of the problem. We may be changing some protocols for this system in the New Year to improve this situation. I am open to your suggestions, My aim is to make these systems better than ever for your usage in the coming year. Thank you for your support, James Conway 650-725-7075. From hphan at snf.stanford.edu Thu Dec 20 12:06:25 2001 From: hphan at snf.stanford.edu (Henry Phan) Date: Thu, 20 Dec 2001 12:06:25 -0800 Subject: Cookie Message-ID: <3C2244C1.CDDAFFCD@snf.stanford.edu> Hi All: I got cookie from Dan T. Please come and get it. -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu