Wafer handling

Mary Tang mtang at snf.stanford.edu
Wed Jun 12 14:47:09 PDT 2002


Hi all--

Sorry, I thought I sent this out, but understand that NO ONE got it.
This is the wafer handling procedure, modified from Sonar Shah's notes.
I was thinking this might be useful for the REU's.  Suggestions,
comments, advice are appreciated.

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at snf.stanford.edu

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