Wafer handling

Mary Tang mtang at snf.stanford.edu
Wed Jun 12 14:47:09 PDT 2002

Hi all--

Sorry, I thought I sent this out, but understand that NO ONE got it.
This is the wafer handling procedure, modified from Sonar Shah's notes.
I was thinking this might be useful for the REU's.  Suggestions,
comments, advice are appreciated.


Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at snf.stanford.edu

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