From mtang at snf.stanford.edu Mon Nov 4 12:53:05 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 04 Nov 2002 12:53:05 -0800 Subject: Weekly Report Message-ID: <3DC6DE31.85E91E13@snf.stanford.edu> Hi all -- My weekly -- sorry, no "quote of the week" from me... By the way, just a reminder from the Process Staff Meeting last week: we discussed the need to evaluate process control on some key tools in the lab. The primary tools identified (by Friday's staff meeting) as being important for monitoring equipment uptime are listed below (sorry, didn't have this list handy for our process meeting). Not only should our goal to be to have this equipment up as much as possible, but the equipment should perform to a specified level. So, we should consider monitoring the processes at these tools (and others, if we feel it necessary.) Please, everyone, review the list below and try to come up with process monitors that make sense to labmembers and to us. They can be routine etch rates on test wafers for example; or they can be information that users log during the course of their process -- whatever you feel is important to watch in order to gage the health of your system. Can we have this done for the next process meeting? (Hopefully, next week.) Thanks! Mary _________________________________ List of "critical tools" as determined by utilization and visibility (subject to change!) stsetch svgcoat svgdev wbdiff wbnonmetal evalign karlsuss semihitachi drytek2 wbgeneral tylannitride tylanbpsg ebeam tystar/tylanpoly matrix pquest innotec epi gryphon tylan2, tylan3 p5000 raith please review the tools in your area and assemble a list of process monitors that you would like to see... Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: WR11-4.doc Type: application/msword Size: 54272 bytes Desc: not available URL: From jperez at snf.stanford.edu Fri Nov 8 16:25:09 2002 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 08 Nov 2002 16:25:09 -0800 Subject: Two weeks Process Report Message-ID: <3DCC55E5.91A7F4B0@snf.stanford.edu> -- Jeannie Perez Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650) 723-7997 jperez at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: WR Oct - Nov 8.doc Type: application/msword Size: 31232 bytes Desc: not available URL: From hphan at snf.stanford.edu Mon Nov 11 12:11:25 2002 From: hphan at snf.stanford.edu (Henry Phan) Date: Mon, 11 Nov 2002 12:11:25 -0800 Subject: Bi-Weekly Report Message-ID: <3DD00EED.F8195E5B@snf.stanford.edu> Happy Veterans' Day!!!!!!!!!!! -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: Weekly Report.doc Type: application/msword Size: 38912 bytes Desc: not available URL: From mtang at snf.stanford.edu Mon Nov 11 12:44:38 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 11 Nov 2002 12:44:38 -0800 Subject: Process Staff meeting & December shutdown Message-ID: <3DD016B6.171CA7EA@snf.stanford.edu> Hi all -- Let's have a process staff meeting this Wednesday, at noon, in CIS 201. Dick will be presenting his detailed plan for the holiday shutdown. I believe it is pretty official (or as official as it gets...) The holiday lab shutdown will commence in the morning on Friday, Dec. 20. Some stations will begin shutdown earlier in the week, but the goal is to have the lab entirely shutdown by Friday afternoon. Start-up of the lab will begin first thing in the morning on Thursday, January 2. The plan is to have all the equipment turned on by Friday afternoon. I personally think it would be very nice to have the lab operational (i.e., process qualified enough so that people can start running wafers) on Monday, Jan. 6. So, please think about your holiday plans and how they might relate to the shutdown. If you're not going to be here for the startup, please think about contingencies (backup from your fellow process staffers, or detailed instructions to users) for qualifying your area. Please think about specific questions/issues you may have for Dick so that he can include them in his shutdown plans. There will also be a lot of work done in the lab over the shutdown. There will be some facilities work which will require that all power to the lab be shut off -- so, please also think about how and when to set power-down conditions in your respective areas. Bring all your questions, ideas, and concerns to the meeting. Pizza as usual -- Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mtang at snf.stanford.edu Mon Nov 11 13:19:42 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 11 Nov 2002 13:19:42 -0800 Subject: Weekly Report Message-ID: <3DD01EEE.5B6C11D9@snf.stanford.edu> Mine, for last week... M -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: WR11-8.doc Type: application/msword Size: 27136 bytes Desc: not available URL: From mtang at snf.stanford.edu Tue Nov 12 17:35:46 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Tue, 12 Nov 2002 17:35:46 -0800 Subject: Process Staff Meeting Message-ID: <3DD1AC72.319ECBA1@snf.stanford.edu> Hi all -- Sorry, the process staff meeting will NOT be tomorrow (due to a bargaining unit meeting at noon). So, how about next Monday, 11/18, at 12:30 pm (yes, that's 12:30 -- as I am a lucky tour guide for our next batch of new labmembers!) Or, next Friday, 11/22, at noon? (Wednesday is the potluck -- say, did you know that Bob Wheeler is BBQ'ing a turkey??!!!) Let me know what works for y'all. On the agenda: Dick will present the shutdown schedule. We'll need to discuss coverage for it. Also on the agenda: revisit our cross-training matrix. And hopefully, we may have some data on training recharges. Let me know! Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From jperez at snf.stanford.edu Fri Nov 15 16:23:37 2002 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 15 Nov 2002 16:23:37 -0800 Subject: Weekly Report Nov. 11 - 15 Message-ID: <3DD59009.3A96CDA5@snf.stanford.edu> -- Jeannie Perez Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650) 723-7997 jperez at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: WR Nov 11-15.doc Type: application/msword Size: 32256 bytes Desc: not available URL: From mtang at snf.stanford.edu Mon Nov 18 08:08:30 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 18 Nov 2002 08:08:30 -0800 Subject: Process Staff Mtg Message-ID: <3DD9107D.C197C1F@snf.stanford.edu> Hi all -- Let's have the process staff meeting this Friday, at noon (everyone seems to be able to make it then.) Dick will present the shutdown schedule. Then, we'll talk about training, new students, etc. Sound OK? Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From latta at snf.stanford.edu Mon Nov 18 11:49:03 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 18 Nov 2002 11:49:03 -0800 Subject: 3 Weekly reports in one! Message-ID: <3DD9442F.82F4A743@snf.stanford.edu> Here is three weeks worth of reports.... -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: 28 Oct-15 Nov 02.doc Type: application/msword Size: 23040 bytes Desc: not available URL: From mtang at snf.stanford.edu Mon Nov 18 13:29:02 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 18 Nov 2002 13:29:02 -0800 Subject: Weekly Report Message-ID: <3DD95B9E.C366F789@snf.stanford.edu> Here's my weekly... M -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: WR11-15.doc Type: application/msword Size: 37888 bytes Desc: not available URL: From mtang at snf.stanford.edu Tue Nov 19 08:29:33 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Tue, 19 Nov 2002 08:29:33 -0800 Subject: [Fwd: EE410] Message-ID: <3DDA66ED.1DCD7766@snf.stanford.edu> Uh oh, it's getting near that time for EE410... Let's talk about this at Friday's staff meeting, after Dick's shutdown schedule... Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu -------------- next part -------------- An embedded message was scrubbed... From: Krishna Saraswat Subject: EE410 Date: Mon, 18 Nov 2002 22:23:25 -0800 Size: 1047 URL: From mtang at snf.stanford.edu Wed Nov 20 15:18:18 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 20 Nov 2002 15:18:18 -0800 Subject: Process Staff Meeting Message-ID: <3DDC183A.3D224B1C@snf.stanford.edu> Hi all -- Process Staff meeting, this Friday, at noon, in CIS 201. Pizzas are already on order. On the agenda: 1. Dick will present plans for the lab shutdown/startup. We'll need to discuss plans for process coverage. 2. EE410. Yes, this is returning for the Winter Quarter... 3. Training projects (videos, operating procedure updates, charging schedules, etc.) 4. Go around the table. See you there! Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mtang at snf.stanford.edu Thu Nov 21 17:37:23 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Thu, 21 Nov 2002 17:37:23 -0800 Subject: Eaden Saw Message-ID: <3DDD8A53.FF8DE8EC@snf.stanford.edu> Yes, indeedy, she is coming back.... And she does seem genuinely sincere about doing good this time (I know, I know, we thought so the last couple of times too...) This time, however, she will be mentored by Claudia Richter (crichter) and Dien Nguyen (adnguyen), her coworkers at Los Gatos Research. Dien is her boss now and he is aware of Eaden's status in the lab. Eaden is not to work in the lab unless Claudia or Dien are present -- and it's been made clear that Claudia should be her primary mentor (Dien seems nice and conscientious enough, but has very little experience at SNF.) She is trying to schedule training sessions with some of us process staff -- I'd advise doing the training one-on-one and spending as much time (and charging her your full time as well as the equipment time) as needed to make you feel comfortable that she's going to be using your equipment. I will follow up with again Claudia and Dien to make sure they understand this as well. Thanks for your patience -- Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mtang at snf.stanford.edu Mon Nov 25 13:38:12 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 25 Nov 2002 13:38:12 -0800 Subject: Weekly Report Message-ID: <3DE29844.B02A4671@snf.stanford.edu> -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: WR11-22.doc Type: application/msword Size: 24064 bytes Desc: not available URL: From mahnaz at snf.stanford.edu Tue Nov 26 13:05:46 2002 From: mahnaz at snf.stanford.edu (Mahnaz) Date: Tue, 26 Nov 2002 13:05:46 -0800 Subject: monthly report Message-ID: <3DE3E229.915448ED@snf.stanford.edu> Here it is mahnaz -------------- next part -------------- A non-text attachment was scrubbed... Name: report10-02.doc Type: application/msword Size: 23552 bytes Desc: not available URL: