From mtang at snf.stanford.edu  Mon Oct  6 08:41:14 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Mon, 06 Oct 2003 08:41:14 -0700
Subject: Process Staff Meeting
Message-ID: <3F818D1A.92D084CD@snf.stanford.edu>

Hi all --

How about a process staff meeting?   Does Wednesday, Oct. 8, 12-2 pm,
work for y'all?  (Pizza, CIS 101.)

Agenda:

1.  Welcome Colby!!!

2.  Update from SNF AdCom meeting.

3.  Training videos -
     - Update:  Uli, Maurice, Mike (?)
     - Video training topics and priorities:  All

4.  Operating procedures/qualification tests - I've attached an Excel
spreadsheet here (Operation.xls) which lists all the tools in the lab
(hopefully) and whether there are operating procedures posted on the
website and how recently they've been updated (now this is a guess,
based on my sketchy web update records) and whether there is a written
test.  Please look at your tools, correct the status where necessary
(recognizing that not all tools require operating procedures, such as
the balzers, or written tests.)  And could you all please think about
updating operating procedures on those tools in your area?

5.  Cross-training matrix - I'm attaching the Excel spreadsheet from
Feb. '03, listing everyone's qualifications...  Could you please update
your qualifications?

6.  Problem children in the lab.

And hey, did I send you all Part I of the latest Intro/Safety training
manual?  And the accompanying written test?  If not, let me know --

Thanks,

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu

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From mtang at snf.stanford.edu  Tue Oct  7 10:33:36 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Tue, 07 Oct 2003 10:33:36 -0700
Subject: Process Staff Meeting
Message-ID: <3F82F8F0.7822201D@snf.stanford.edu>

Hi all --

I've heard no objections so far to a process staff meeting, so I've just
ordered pizza (speak now or forever we'll have your piece.)  We're on
for Wednesday (tomorrow) at 12:15 (note time) in CIS 101 (the big room.)

M

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From mtang at snf.stanford.edu  Wed Oct  8 09:20:16 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Wed, 08 Oct 2003 09:20:16 -0700
Subject: Process Staff Mtg - reminder
Message-ID: <3F843940.89E8136B@snf.stanford.edu>

Hi all --

Just a reminder...  Today, 12:15, in CIS 101.

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From mtang at snf.stanford.edu  Mon Oct 13 10:22:13 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Mon, 13 Oct 2003 10:22:13 -0700
Subject: [Fwd: Today's Speaker for Bioengineering/Biodesign Seminar]
Message-ID: <3F8ADF44.4063171D@snf.stanford.edu>

Steve Quake does microfluidics on silicone elastomers -- very showy
stuff.  He also gives good talks.

M

-------- Original Message --------
Subject: Today's Speaker for Bioengineering/Biodesign Seminar
   Date: Mon, 13 Oct 2003 09:43:24 -0700
   From: "Christine Q. Kurihara" <cquinn at stanford.edu>
     To: biodesign-faculty at lists.Stanford.EDU

 The Department of Bioengineering, the Division of Biomechanical
Engineering (ME) and the Biodesign Program are pleased to announce the
second speaker for the weekly Bioengineering & Biodesign Seminar Series,
ME 389. The seminar is held at 4:15 PM - 5:05 PM in the auditorium of
the new James H. Clark Center for Biomedical Engineering and
Sciences. Speakers this quarter are candidates for faculty positions in
the Bioengineering Department. October 13Speaker   Stephen
QuakeTitleAssociate Professor, Applied Physics and Physics, Cal
TechTalkBiological Large Scale Integration A short reception will be
held following the talk at 5:05 pm. -christine

--

Christine Q. KuriharaAssociate Director for Academic
AdministrationBiodesign Program - http://biodesign.stanford.edu/Stanford
UniversityClark Center Rm E128, MC 5428(650) 723-9645   (650) 724-8696
fax
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From mtang at snf.stanford.edu  Mon Oct 13 10:26:04 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Mon, 13 Oct 2003 10:26:04 -0700
Subject: [Fwd: Short Courses for Semiconductor Personnel]
Message-ID: <3F8AE02C.80CEA910@snf.stanford.edu>

Hi all --

Some of these may be interesting to you, in particular:

CMP -- We're getting one of these, and though it won't be here at SNF
(it'll be at Ginzton) or maintained by us, it would be good, I think, to
have some familiarity with this method, since we'll be sending people
over there to use it...

MEMS Design and Fab -- Hopefully, this won't get cancelled again.  This
is taught, I believe, by Kris Pister, and I've been told is a very good,
intro class.

Microcontamination Control -- We don't really focus much on
contamination in our lab, but this will no doubt start attracting more
attention soon!

Photolithography Fundamentals -- Introductory course.

SPC -- We don't do this, at least not yet...  (Just wait until we start
logging data into Coral.)  Extremely useful stuff if you have not seen
this already.

Wet & Dry etch fundamentals -- Introductory course.

If you're interested, let me know.  We've still got one course credit
and we can get a group discount if several people want to go (even if
you take different classes.)

Mary





-------- Original Message --------
Subject: Short Courses for Semiconductor Personnel
Date: 09 Oct 03 08:09:22 -0500
From: "Mark Masters"<tinasilk at gate.net>
To: <mtang at snf.stanford.edu>

Greetings Mary Tang ,

Pinnacle Training International Seminars - PTI Seminars 

For more details about any of these training sessions call 636-343-1333
in 
the United States and ask for Mark Masters. 

ABCs of IC DESIGN & FABRICATION 
   October 17, 2003 in Austin, TX 
   October 23, 2003  in San Jose, CA 
   October 24, 2003 in Phoenix, AZ 
   October 27, 2003 in Munich, Germany 
   November 7, 2003 in Portland, OR 
   December 11, 2003 in San Jose, CA 
   February 9, 2004 in San Jose, CA 
   March 1, 2004 in Portland, OR 
   March 22, 2004 in Phoenix, AZ 

To meet the projected worldwide demand for semiconductor devices, the 
semiconductor industry is demanding technical and non-technical staff
and
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This course describes, in simple terms, a sequential format of
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that constitutes the major fabrication and design processes for
integrated 
devices. This one-day seminar gives you a comprehensive overview of the
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background you need to understand the basics of semiconductor devices,
how
they work, the processing technologies, the equipment to produce them,
and 
circuit design techniques. 
 

ABCs of BASIC ELECTRONICS & DEVICES 
 December 10, 2003 in San Jose, CA 
 March 2, 2004 in  San Jose, CA 

CHEMICAL MECHANICAL PROCESSING Fundamentals 
Presented by:Srini Raghaven 
 November 5, 2004 in Phoenix, AZ 
 February 13, 2004 in San Jose, CA 

CMOS LOGIC DESIGN Intro 
 December 9, 2003 in San Jose, CA 
 March 18, 2004 in San Jose, CA 

DEVICE PHYSICS MADE EASY 
 March 29, 2004 in San Jose, CA 

DUAL DAMASCENE COPPER and Low-k Dielectric Process Overview 
 December 9-10, 2003 in San Jose, CA 
March 23-24, 2004 in San Jose, CA 

DATA MANAGEMENT: Chip Finishing, Tapeout and Data Prep for Mask Making 
January 22, 2004 in San Jose, CA 

MEMS DESIGN & FABRICATION Fundamentals 
 October 28, 2003 in San Jose, CA 
 February 24, 2004 in San Jose, CA 

MICROCONTAMINATION Control 
March 31, 2004 in San Jose, CA 

PHOTOLITHOGRAPHY Fundamentals 
 March 3, 2004 in San Jose, CA 

PRODUCT MARKETING for the Semiconductor Industry 
 November 12, 2003 in San Jose, CA 
 February 18, 2004 in San Jose, CA 

RF MEMS and Circuit Design for Wireless Communications 
 December 4, 2003 in San Jose, CA 

RF Wireless MEMS Technology & Commercialization Intro 
 October 29, 2003 in San Jose, CA 
 February 25, 2004 in San Jose, CA 

STATISTICAL PROCESSING CONTROL (SPC) Intro 
 March 30, 2004 in San Jose, CA 

WET & DRY ETCH Fundamentals 
 February 11, 2004 - San Jose, CA 

YIELD MANAGEMENT: Quick Ramp Practices 
 December 1-2, 2003 in San Jose, CA 
 March 11-12, 2004 in San Jose, CA 
  

CHECK OUR WEB SITE FOR ADDITIONAL COURSES!! 
http://www.pti-inc.com 
  

For a FULL TRAINING SCHEDULE of public course dates visit 
http://www.pti-inc.com and click on Course Schedule 

TO REGISTER 
Go To http://www.pti-inc.com 
and click on Registration ! 

Contact PTI to Discuss: 
Offering them ONSITE or ATTENDING these courses 

Contact us at (636) 343-1333 in the USA. 
Ask for MARK MASTERS. 
* Fax (636) 343-8642 
* Email: mark at pti-inc.com 
  

Pinnacle Training International Seminars, Inc. (PTI Seminars) 
"We Exceed Your Expectations!" 


This mail is for mutual benefit. If you have received this message in
error 
and/or if you wish to be removed from our list, please reply with
"remove"
in the subject line of your e-mail. We apologize for any inconvenience 
caused.


From mtang at snf.stanford.edu  Tue Oct 14 16:41:06 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Tue, 14 Oct 2003 16:41:06 -0700
Subject: Vacation schedules
Message-ID: <3F8C8992.9258BF26@snf.stanford.edu>

Hi all --

I was thinking... To avoid mixed messages and confusion, let's all write
our vacation schedules (or other planned schedules, such as jury duty)
on the master calendar in Mahnaz' office.  And we should also try to all
abide by some guidelines about scheduling.  May I suggest the following:

1.  At least two weeks' notice for vacation days -- preferably four
weeks' if you're taking off for a week or more.  Please send an email
out to other process staffers so that everyone can double check against
their own schedules.  Yes, sometimes things can be unpredictable
(unexpected relatives in town, etc.) but it would minimize disruptions
and would only be courteous to let each other know vacation plans as
they are made.

2.  Write vacation dates on the white board.  If you're taking off for
one day, then the previous day is fine.  If you're taking off for a week
or more, please try to write the schedule on the board at least a week
in advance, so that labmembers know you won't be available.

3.  If you are taking off a week or more, please use the "vacation"
message utility on your email.  This way, people can redirect their
inquiries to you to the appropriate backups.  If you don't know how to
use this, let me know.

4.  If your planned vacation schedule overlaps with that of another
staff member's, let's meet up to discuss how this might affect coverage
in the lab and work out a compromise, if needed.

What do you think?  Anything else?

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From jwc at snf.stanford.edu  Wed Oct 15 12:26:28 2003
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 15 Oct 2003 12:26:28 -0700
Subject: discontinue 950K
References: <3F8D9930.F3721971@snf.stanford.edu>
Message-ID: <3F8D9F64.89451267@snf.stanford.edu>

Hi everyone:

Just to clarify Mahnaz's last email...

 - Microchem Corp. materials are more consistent lot to lot :: batch to
batch.  In the future we will only order PMMA from Microchem and NOT Arche
or Gallade Chemical.

 - This work refers to the 2% 950,000 Molecular Weight PMMA material only
and has no reference to the STD. 5% 495,000 Molecular weight PMMA.  The 2%
950K MW PMMA  is our high resolution Ebeam resist used in single and
bi-layer processing in our lab here.

The 5% 495,000 Molecular weight PMMA is our Standard PMMA material system to
result in slightly thicker films to ~300 - 250 nm thickness and it is the
workhorse Ebeam resist we use here at SNF.

While the 9% 950,000 MW PMMA is inventoried here and is currently 'in the
house'.  I see little to no apparent need for us to stock it, as that most
users of this material are using it for planarization and surface protective
films, and we have no process defined to work with it.  We should carefully
review the need to determine if we wish to stock, provide process support,
and track results of this material with users.  I occasionally see users
confused with the various viscousities and molecular weights of these
materials resulting in application of the material types in error leading to
various process results.

THANK YOU,

James Conway


Mahnaz Mansourpour wrote:

> Hello all,
>
> It has been decided to discontinue the order of OCG PMMA 950k 2%.
> Apparently the batch to batch does not produce the same result and James
> gets better result from Pmma 495K mw  2%.
> We still have 3 small bottles of these materials and one whole big
> bottle in the box that Dave will try to see if we can send it back ( if
> not we will use it up, but please no more ordering of these from Gallade
> Chemical Inc.).
> Please any problem or issue with this let James or me know.
> Apparently that goes for pmma 9% as well, do we need it? the usage is
> very low?
>
> mahnaz
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From mtang at snf.stanford.edu  Wed Oct 22 10:46:28 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Wed, 22 Oct 2003 10:46:28 -0700
Subject: Lab Tours?
Message-ID: <3F96C274.A9560E2D@snf.stanford.edu>

Hi all --

It's that time again...  The Berkeley-Stanford-MIT Nanotech Forum is
having a symposium next Thursday evening, 10/30 (check out the website
at:  http://www.quantuminsight.com/_MSB/) and its organizers have
requested lab tours before the event.  The registration has been limited
to 8 people per tour, with tours departing at 5 pm, 5:30 pm, and 6 pm.
These tours are inside the lab and we're expecting them to run about 45
minutes.  Needless to say, I'm trawling for volunteers to lead these
tours.  Anyone interested?

Tours so far have been a mix of long-time semiconductor engineers and
investment people (i.e., VC's.)  Considering that we are hoping to
launch an SNF Affiliates program targeting VC's and like-minded folk,
these tours may be an opportunity for us to gage the interest of this
target audience and maybe sell them a little of the magic of "Stanford"
and "Nano-".

By the way, the symposium lineup is an .... interesting group of people
(one of the distinguished speakers once told me that my thesis work was
"bull$%^#" at a conference poster session, but then offered me a job at
his startup by the end of the conference, so maybe he didn't think it
was so bad...)

One more thing -- lunch, on me, downtown, for tour guides.

Thanks,

Mary


--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From latta at snf.stanford.edu  Wed Oct 22 11:06:13 2003
From: latta at snf.stanford.edu (Nancy Latta)
Date: Wed, 22 Oct 2003 11:06:13 -0700
Subject: Lab Tours?
In-Reply-To: <3F96C274.A9560E2D@snf.stanford.edu>
References: <3F96C274.A9560E2D@snf.stanford.edu>
Message-ID: <3F96C715.50208@snf.stanford.edu>

Mary Tang wrote:

>By the way, the symposium lineup is an .... interesting group of people
>(one of the distinguished speakers once told me that my thesis work was
>"bull$%^#" at a conference poster session, but then offered me a job at
>his startup by the end of the conference, so maybe he didn't think it
>was so bad...)
>
Touring blowhards?  I am in!  
Can I get one of the earlier tours, say, 5:30?

>One more thing -- lunch, on me, downtown, for tour guides.
>
Oh yeah!!

---

Nancy Latta
Stanford Nanofabrication Facility
CIS Bldg, 145
420 Via Palou Mall
Stanford, CA, 94305 - 4070 
(650) 725-6727
Fax (650) 725-6278




From mtang at snf.stanford.edu  Wed Oct 22 11:27:26 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Wed, 22 Oct 2003 11:27:26 -0700
Subject: Lab Tours?
References: <3F96C274.A9560E2D@snf.stanford.edu> <3F96C715.50208@snf.stanford.edu>
Message-ID: <3F96CC0E.48EEA341@snf.stanford.edu>

Cool!  You're down for 5:30 (thanks!)  So, how's Three Seasons?

Any other takers?

M

Nancy Latta wrote:

> Mary Tang wrote:
>
> >By the way, the symposium lineup is an .... interesting group of people
> >(one of the distinguished speakers once told me that my thesis work was
> >"bull$%^#" at a conference poster session, but then offered me a job at
> >his startup by the end of the conference, so maybe he didn't think it
> >was so bad...)
> >
> Touring blowhards?  I am in!
> Can I get one of the earlier tours, say, 5:30?
>
> >One more thing -- lunch, on me, downtown, for tour guides.
> >
> Oh yeah!!
>
> ---
>
> Nancy Latta
> Stanford Nanofabrication Facility
> CIS Bldg, 145
> 420 Via Palou Mall
> Stanford, CA, 94305 - 4070
> (650) 725-6727
> Fax (650) 725-6278

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From mahnaz at snf.stanford.edu  Wed Oct 22 16:23:26 2003
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 22 Oct 2003 16:23:26 -0700
Subject: lab tour
Message-ID: <3F97116E.717EA231@snf.stanford.edu>


Hello all,

Iwill take the 5 pm.

mahnaz



From mtang at snf.stanford.edu  Fri Oct 24 11:40:29 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Fri, 24 Oct 2003 11:40:29 -0700
Subject: Process Staff Meeting
Message-ID: <3F99721D.9EB43F85@snf.stanford.edu>

Hi all --

How's next Wednesday, 10/29, at noon, for a process staff meeting?  I
propose the following agenda:

1.  Metrics that would be useful (training or staff activity recharges?
Usage on specific tools?) and routine reports which can be derived from
the Coral databases that we can now access.
2.  Projects.  Let's compile a list of projects that process staff
members are working on.  It can be something you're working on by
yourself or with someone else (another staff member, a labmember, a
faculty member).  It can be something to streamline training, improve
documentation, characterize processes -- just about anything that is
proactive.
3.  Regular reports.  We used to do these weekly, but needless to say,
we've fallen off the track (and I'm just about the guiltiest party.)  I
propose a monthly report -- maybe a regular project update?  but let's
discuss this.

Any other agenda suggestions?  Let me know how the date/time works for
you...  I've got 215 reserved and we'll have the usual pizza, unless I
hear otherwise.

Thanks,

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From mahnaz at snf.stanford.edu  Fri Oct 24 13:08:38 2003
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Fri, 24 Oct 2003 13:08:38 -0700
Subject: Process Staff Meeting
References: <3F99721D.9EB43F85@snf.stanford.edu>
Message-ID: <3F9986C5.FB084606@snf.stanford.edu>

Hi mary

I will not be able to attend due to EV presentation in the morning and
presentation in lab  in front of the tool at 1:30 pm.
mahnaz

Mary Tang wrote:

> Hi all --
>
> How's next Wednesday, 10/29, at noon, for a process staff meeting?  I
> propose the following agenda:
>
> 1.  Metrics that would be useful (training or staff activity recharges?
> Usage on specific tools?) and routine reports which can be derived from
> the Coral databases that we can now access.
> 2.  Projects.  Let's compile a list of projects that process staff
> members are working on.  It can be something you're working on by
> yourself or with someone else (another staff member, a labmember, a
> faculty member).  It can be something to streamline training, improve
> documentation, characterize processes -- just about anything that is
> proactive.
> 3.  Regular reports.  We used to do these weekly, but needless to say,
> we've fallen off the track (and I'm just about the guiltiest party.)  I
> propose a monthly report -- maybe a regular project update?  but let's
> discuss this.
>
> Any other agenda suggestions?  Let me know how the date/time works for
> you...  I've got 215 reserved and we'll have the usual pizza, unless I
> hear otherwise.
>
> Thanks,
>
> Mary
>
> --
> Mary X. Tang, Ph.D.
> National Nanofabrication Users' Network
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu



From mtang at snf.stanford.edu  Fri Oct 24 13:23:38 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Fri, 24 Oct 2003 13:23:38 -0700
Subject: Process Staff Meeting
References: <3F99721D.9EB43F85@snf.stanford.edu> <3F9986C5.FB084606@snf.stanford.edu>
Message-ID: <3F998A4A.22AA67F5@snf.stanford.edu>

Wups!  A couple people can't make next Wednesday -- how about the following
Wed., 11/5?

Mary

Mahnaz Mansourpour wrote:

> Hi mary
>
> I will not be able to attend due to EV presentation in the morning and
> presentation in lab  in front of the tool at 1:30 pm.
> mahnaz
>
> Mary Tang wrote:
>
> > Hi all --
> >
> > How's next Wednesday, 10/29, at noon, for a process staff meeting?  I
> > propose the following agenda:
> >
> > 1.  Metrics that would be useful (training or staff activity recharges?
> > Usage on specific tools?) and routine reports which can be derived from
> > the Coral databases that we can now access.
> > 2.  Projects.  Let's compile a list of projects that process staff
> > members are working on.  It can be something you're working on by
> > yourself or with someone else (another staff member, a labmember, a
> > faculty member).  It can be something to streamline training, improve
> > documentation, characterize processes -- just about anything that is
> > proactive.
> > 3.  Regular reports.  We used to do these weekly, but needless to say,
> > we've fallen off the track (and I'm just about the guiltiest party.)  I
> > propose a monthly report -- maybe a regular project update?  but let's
> > discuss this.
> >
> > Any other agenda suggestions?  Let me know how the date/time works for
> > you...  I've got 215 reserved and we'll have the usual pizza, unless I
> > hear otherwise.
> >
> > Thanks,
> >
> > Mary
> >
> > --
> > Mary X. Tang, Ph.D.
> > National Nanofabrication Users' Network
> > Stanford Nanofabrication Facility
> > CIS Room 136, Mail Code 4070
> > Stanford, CA  94305
> > (650)723-9980
> > mtang at stanford.edu
> > http://snf.stanford.edu

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu