From jwc at snf.stanford.edu Mon Dec 18 14:42:08 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 18 Dec 2006 14:42:08 -0800 Subject: RAITH Offline for the Holidays!! Plan to return to service January 5 for RAITH Champions and Jan 10th for All other users. SHUT DOWN AND START UP PLAN. Message-ID: <45871940.1010808@snf.stanford.edu> *Happy Holiday Greetings to the Raith Community: The Year in Review: * Well it was a wild ride for the RAITH community this last year with a great run of uptime through the first two thirds of the year; followed by several upsets resulting in significant downtime during the later months of 2006. However All-in-All the performance of the system has been superb and well within the system specifications. 2006 also saw the RAITH community grow to almost 150 members as some older Users migrating off the system as they graduate and a very large group of new users coming onto the system late this year. In November alone we had 10 new users start on the system with only a few load lock errors encountered. By my count I have now trained more than 160 users on the RAITH system to date at Stanford University. In 2006 we also observed the first RIE etched EBL features coming off the RAITH system with line width features below 10 nm. In fact several structures were found for Single Pixel Lines with line widths, and and single shot Dot diameters, in the 5 to 7 nm range. This is world class Electron Beam Lithography results and everyone working in the SNF Ebeam Lab should feel a sense of being a participant in this effort. Good Job to everyone! *Special Thanks to the following People and Groups: * I would like to thank the entire RAITH Community, especially the many RAITH Champions, for your efforts above and beyond the call of duty to keep the system up, help the many new Users come up to speed, and always being there to lend a hand when it was needed. I would also like to thank all the members of Raith USA Inc. and RAITH GmbH in Dortmund, Germany for their constant encouragement and support as we have moved through several software upgrades and for responding to problems and support when we have needed it. Thanks also to Mike Santomango with Carl Zeiss SMT for many service responses and timely phone calls. Finally a special thanks to Dick Crane, Ted Berg, and the entire maintenance group whom have worked tirelessly behind the scenes ensuring the facility stays up so our systems can also maintain uptime. Dick is retiring next month so say 'hello' the next time you see him in passing and _Thank Him_ before he leaves at the end of January. Finally thanks to Mary Tang for her patience and gentle leadership; to Paul Jerabek and Ted Berg for continuing to take on and tame the Hitachi HL-700-F so I can concentrate on the RAITH. Finally Many kudos's also go out to all of our SNF Process Staff whom maintain a lab that we can get our work done with the highest quality. Overall I think 2006 was a great year! I look forward to the same level of engagement with all users on the RAITH tool in 2007. My hope in 2007 is to push the limits of what we can do on the RAITH system, improve the metrology and imaging equipment available to users working in the SNF Cleanroom and Ebeam Lab all the while creating pathways to everyone's success in their research in nanotechnology at the Stanford Nanofabrication Facility. To each and every one of you, and to your families, a very Joyous Holiday Season and a Happy New Year! Safe Travels where ever you go, James Conway Ebeam Lab Stanford Nanofabrication Facility _*Schedule for Shutdown and Startup:*_ 12-18-2006 12:00 Noon Lab and RAITH system are shut down and in Bake Out for the Holiday NO USER ACCESS TO THE CLEAN ROOM. 01-04-2007 10 - 15:00 hours ZEISS Field Service comes in and brings the FE-GUN back on line. NO USER ACCESS TO THE SYSTEM. 01-04-2007 10 - 15:00 hours to 15:00 01-05-2007: FE_GUN run in and conditioning. 01-05-2007 10 AM Zeiss Field Service performs Electron Optics card adjustments and performs a preliminary system check out. NO USER ACCESS TO THE SYSTEM. 01-05-2007 15:00 to 11:00 01-08-2007. Possible access to the RAITH system if handed off for 'testing' by ZEISS Field Service. _*RAITH Champion user access ONLY -- unless escorted by a RAITH Champion. *_01-08-2007 12:00 to 01-09-2005 1800 hours SYSTEM off line to users for RAITH USA Inc. Field Service for some preventative service on the cooling section and Laser Interferometer Stage and Loader of the RAITH system. This will be followed by the RAITH Qualification for Performance as we have done in the past. There may exist some periods over each evening when the RAITH may be available by Users to assist us in performance testing. We will do our best to return the system to all Users as soon as possible during this week once the system is qualified. _* JWC's Request for 'Safe and Sane' *__*Coral *__*reservations: *_To avoid massive jumbling and consequent grumblings during the start up of the RAITH system in January I am requesting you: * Please do not make reservations on CORAL for any time before January 5, 2007 at 15:00 hours. Likely there will be no system access until after this time at the very best. * Only RAITH Champions may make Coral reservations for any time *before* WED. January 10, 2007 at 12:00 Noon. The Coral schedule will begin in earnest for all users at that time. * All Users are encouraged to 'Share the Ride' and optimize the operations time by working closely with the User before and after your session to hand off the system smoothly. This is in order to allow everyone a chance to come back onto the system in the first two weeks of operations in 2007! Users should start timing their writes to avoid idle time at the end of their reservations time slots. Please strive to improve the throughput of the system now that we have so many users on the tool! *Thank you for your support! ** **James Conway 415-412-4825 cell... * I will be returning to SNF mid to late morning Monday 01-08-2007. I will be unavailable except for emergencies from December 26, 2006 - January 2, 2007. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... 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