From zhangy at snf.stanford.edu Thu Mar 3 16:53:14 2005 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Thu, 3 Mar 2005 16:53:14 -0800 Subject: Problem prometrix SNF 2005-03-03 16:53:13: load problem Message-ID: Hi, There is a wierd problem with Prometrix when I used it today. The stages could not go up and down automatically, so that I could not load and unload my wafers. From uli at snf.stanford.edu Mon Mar 7 17:50:46 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Mon, 7 Mar 2005 17:50:46 -0800 Subject: Problem prometrix SNF 2005-03-03 16:53:13: load problem Message-ID: system was in DEMO MODE. Never push the button : Turn demo on From king at snf.stanford.edu Mon Mar 14 22:57:07 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 14 Mar 2005 22:57:07 -0800 Subject: Problem prometrix SNF 2005-03-14 22:57:06: Stage rotation noise Message-ID: It sounds like a bearing or similar problem. From emyers at snf.stanford.edu Tue Mar 15 08:21:30 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 15 Mar 2005 08:21:30 -0800 Subject: Shutdown prometrix SNF 2005-03-15 08:21:29: Stage Rotation Message-ID: Rotation mechanism is bad. Losts of vibration and it is not making it to the correct positions. From emyers at snf.stanford.edu Fri Mar 18 14:55:45 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 18 Mar 2005 14:55:45 -0800 Subject: Problem prometrix SNF 2005-03-14 22:57:06: Stage rotation noise Message-ID: Problem with rotation confirmed, shut down system From emyers at snf.stanford.edu Fri Mar 18 14:56:21 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 18 Mar 2005 14:56:21 -0800 Subject: Shutdown prometrix SNF 2005-03-15 08:21:29: Stage Rotation Message-ID: Elmer fixed drive motor contacts. Rotation is back to normal.