From nvgirish at snf.stanford.edu Tue Feb 7 21:52:13 2006 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Tue, 7 Feb 2006 21:52:13 -0800 Subject: Problem prometrix SNF 2006-02-07 21:52:13: Machine went into Demo mode Message-ID: Hi all The machine went into demo mode when I was measuring sheet resistance (for some unknown reason). I reset it but the wafer table is no longer moving smoothly and the machine is not performing any measurement. Girish From jperez at snf.stanford.edu Wed Feb 8 11:28:05 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 8 Feb 2006 11:28:05 -0800 Subject: Shutdown prometrix SNF 2006-02-08 11:28:04: machine in Demo mode Message-ID: Per problem message. Unable to get stage to move. From cbaxter at snf.stanford.edu Tue Feb 14 13:53:19 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Feb 2006 13:53:19 -0800 Subject: Shutdown prometrix SNF 2006-02-08 11:28:04: machine in Demo mode Message-ID: lube theata stage with silicon lubericant and tested theata rotation with EricP using test wafer, no dragging or vibration on theata rotation. From cbaxter at snf.stanford.edu Tue Feb 14 13:53:46 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Feb 2006 13:53:46 -0800 Subject: Problem prometrix SNF 2006-02-07 21:52:13: Machine went into Demo mode Message-ID: