Problem prometrix SNF 2006-02-07 21:52:13: Machine went into Demo mode

nvgirish at snf.stanford.edu nvgirish at snf.stanford.edu
Tue Feb 7 21:52:13 PST 2006


Hi all
   The machine went into demo mode when I was measuring sheet resistance (for some unknown reason). I reset it but the  wafer table is no longer moving smoothly and the machine is not performing any measurement.
Girish




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