Problem prometrix SNF 2010-03-24 20:48:14: Stage motion is jerky

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Aug 10 14:48:13 PDT 2010


cleaned up stage , cleaned and lubricated  chuck SPindle , removed 
broken pieces from stage ( they were actually  getting stuck to the 
bottom chuck  therefore the chuck was not moving properly.)
Ok to use . 




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