From zpatel at snf.stanford.edu Thu Oct 14 16:51:23 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 14 Oct 2010 16:51:23 -0700 Subject: Comment prometrix SNF 2010-10-14 16:51:23: Data Disk Full Message-ID: From clifton at snf.stanford.edu Thu Oct 21 08:53:24 2010 From: clifton at snf.stanford.edu (clifton at snf.stanford.edu) Date: Thu, 21 Oct 2010 08:53:24 -0700 Subject: Problem prometrix SNF 2010-10-21 08:53:24: Message-ID: From clifton at snf.stanford.edu Thu Oct 21 08:55:39 2010 From: clifton at snf.stanford.edu (clifton at snf.stanford.edu) Date: Thu, 21 Oct 2010 08:55:39 -0700 Subject: Problem prometrix SNF 2010-10-21 08:55:38: System error Message-ID: I was trying to use prometrix to measure the sheet resistance of wafers I had diffusion doped in tylan6. Prometrix gave an arror message: System Error: -5518 and repeatedly went into an A.R.T. System Resest. Not sure what the issue is. From jperez at snf.stanford.edu Thu Oct 21 09:01:32 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Oct 2010 09:01:32 -0700 Subject: Comment prometrix SNF 2010-10-14 16:51:23: Data Disk Full Message-ID: New disk installed. From uli at snf.stanford.edu Thu Oct 21 15:07:33 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 21 Oct 2010 15:07:33 -0700 Subject: Problem prometrix SNF 2010-10-21 08:55:38: System error Message-ID: user fixed it From uli at snf.stanford.edu Thu Oct 21 15:07:47 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 21 Oct 2010 15:07:47 -0700 Subject: Problem prometrix SNF 2010-10-21 08:53:24: Message-ID: