Problem prometrix SNF 2010-10-21 08:55:38: System error

clifton at snf.stanford.edu clifton at snf.stanford.edu
Thu Oct 21 08:55:39 PDT 2010


I was trying to use prometrix to measure the sheet resistance of wafers I had diffusion doped in tylan6.  Prometrix gave an arror message: System Error: -5518 and repeatedly went into an A.R.T. System Resest.  Not sure what the issue is.




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