From mcvittie at snf.stanford.edu Tue Jan 14 13:59:57 2003 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Tue, 14 Jan 2003 13:59:57 -0800 Subject: Proposed Changes in Use of Prometrix Message-ID: <3E24885D.EAA35A46@snf.stanford.edu> Prometrix users, Presently, the Prometrix is classified to be in Semiclean Equipment Group in SNF. To make it easier to use by a wider user group, I propose that we take this restriction off and allow all materials which do not harm the tips to be used. This will mean that Semiclean wafers can not go back into sSemiclean tools after measurement on the Prometrix. Please contact me ASAP if you do not agree with this change. Thanks, Jim McVittie From mbadi at relgyro.stanford.edu Tue Jan 14 14:41:07 2003 From: mbadi at relgyro.stanford.edu (Mohammed H. Badi) Date: Tue, 14 Jan 2003 14:41:07 -0800 (PST) Subject: Proposed Changes in Use of Prometrix In-Reply-To: <3E24885D.EAA35A46@snf.stanford.edu> Message-ID: McVittie, I thought there were two probes for the Prometrix, one being for dirty wafers and the other for semi-clean. Is this not the case? Those of us in the Khuri-Yakub lab use Prometrix in the very first step (among others) of our process. We could make some modifications in our run to account for the change you suggested, but would like to avoid doing so if possible. Thanks. Mohammed Badi On Tue, 14 Jan 2003, Jim McVittie wrote: > Prometrix users, > > Presently, the Prometrix is classified to be in Semiclean Equipment > Group in SNF. To make it easier to use by a wider user group, I propose > that we take this restriction off and allow all materials which do not > harm the tips to be used. This will mean that Semiclean wafers can not > go back into sSemiclean tools after measurement on the Prometrix. Please > > contact me ASAP if you do not agree with this change. > > Thanks, Jim McVittie > > -------- Mohammed H. Badi "2c2e" 650.906.0663 From mcvittie at snf.stanford.edu Tue Jan 14 15:27:12 2003 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Tue, 14 Jan 2003 15:27:12 -0800 Subject: Proposed Changes in Use of Prometrix References: <3E24885D.EAA35A46@snf.stanford.edu> Message-ID: <3E249CD0.7737086F@snf.stanford.edu> Prometrix Users, Several users have replied to my note. For now there will be no changes in the procedures/rules for using the Prometrix. Jim McVittie Jim McVittie wrote: > Prometrix users, > > Presently, the Prometrix is classified to be in Semiclean Equipment > Group in SNF. To make it easier to use by a wider user group, I propose > that we take this restriction off and allow all materials which do not > harm the tips to be used. This will mean that Semiclean wafers can not > go back into sSemiclean tools after measurement on the Prometrix. Please > > contact me ASAP if you do not agree with this change. > > Thanks, Jim McVittie