Proposed Changes in Use of Prometrix

Jim McVittie mcvittie at
Tue Jan 14 13:59:57 PST 2003

Prometrix users,

Presently, the Prometrix is classified to be in Semiclean Equipment
Group in SNF. To make it easier to use by a wider user group, I propose
that we take this restriction off and allow all materials which do not
harm the tips to be used. This will mean that Semiclean wafers can not
go back into sSemiclean tools after measurement on the Prometrix. Please

contact me ASAP if you do not agree with this change.

    Thanks,   Jim McVittie

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