[PT-MTL-pcs] Comment PT-MTL SNF 2013-11-04 15:26:09: 6" - Post processing

uraghuram at rambus.com uraghuram at rambus.com
Mon Nov 4 15:26:10 PST 2013


Finished processing; Ran Cl2 clean -90s; CF4 clean 30sec and O2 clean 5 min; set to standby temp; can be converted back to 4".  Thanks,
Usha


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