[PT-MTL-pcs] Comment PT-MTL SNF 2013-11-12 18:47:54: Finished 6" processing

uraghuram at rambus.com uraghuram at rambus.com
Tue Nov 12 18:47:54 PST 2013


Ran Cl2 and Fluorine clean.  Tried running o2 clean.  Aborted with error - source impedence too high. Left wafer in chamber.  Brought temp to standby temp.


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