[PT-MTL-pcs] Comment PT-MTL SNF 2013-11-20 17:14:28: 6" work done

uraghuram at rambus.com uraghuram at rambus.com
Wed Nov 20 17:14:29 PST 2013


Chamber clean using Cl2 recipe and CF4 recipe as well as O2 clean are done. Set temp to standby.  Ready for conversion back to 4"


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