[PT-MTL-pcs] Problem PT-MTL SNF 2014-07-22 14:56:36: He back pressure

agupta66 at gmail.com agupta66 at gmail.com
Tue Jul 22 14:56:37 PDT 2014


Even with dummy wafer, He backpressure will not reach 3000 mTorr.  Found a small piece of edge of my wafer had broken.  This could be cause of the backpressure problem.  
Putting tool on standby temperature.  



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