[PT-MTL-pcs] Comment PT-MTL SNF 2014-07-31 16:53:50: Qual data:

usha at stanford.edu usha at stanford.edu
Thu Jul 31 16:53:50 PDT 2014


Etch recipe: Al-HiPRSel-ER; 
70 Cl2/ 50 BCl3/10 N2/1000W ICP/ 150W BP/7mT
Al ER = 8903A/min; Unif = 8.3%
SiO2 ER = 1805A/min
PR ER = 7233A/min
Si ER = 5326A/min; Unif = 1.24%
Al/PR Sel = 1.23
Al/SiO2 Sel = 4.93
Al/Si Sel = 1.67



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