[PT-MTL-pcs] Problem PT-MTL SNF 2014-06-29 09:57:29: Cracked wafer

kdow13 at stanford.edu kdow13 at stanford.edu
Sun Jun 29 09:57:29 PDT 2014


My last wafer was cracked on removal today, while the wafer was mostly intact, some small pieces might still be in the chamber.



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