[PT-MTL-pcs] Shutdown PT-MTL SNF 2014-06-29 11:48:10: wafer cracked. helium pressure not working

seansl at stanford.edu seansl at stanford.edu
Sun Jun 29 11:48:10 PDT 2014


My wafers with only ALD film did not meet the He pressure requirements. after o2 plasma and my 3rd try, my wafer cracked. It looks like the previous person's cracked wafer pieces are in there causing problems. 



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